Highly decoupled single-crystal silicon resonators: an approach for the intrinsic quality factor (English)
- New search for: Le Foulgoc, B.
- New search for: Bourouina, T.
- New search for: Le Traon, O.
- New search for: Bosseboeuf, A.
- New search for: Marty, F.
- New search for: Breluzeau, C.
- New search for: Grandchamp, J.-P.
- New search for: Masson, S.
- New search for: Le Foulgoc, B.
- New search for: Bourouina, T.
- New search for: Le Traon, O.
- New search for: Bosseboeuf, A.
- New search for: Marty, F.
- New search for: Breluzeau, C.
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In:
Micromechanics; MME 16
6
;
S45-S53
;
2006
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ISSN:
- Conference paper / Print
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Title:Highly decoupled single-crystal silicon resonators: an approach for the intrinsic quality factor
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Contributors:Le Foulgoc, B. ( author ) / Bourouina, T. ( author ) / Le Traon, O. ( author ) / Bosseboeuf, A. ( author ) / Marty, F. ( author ) / Breluzeau, C. ( author ) / Grandchamp, J.-P. ( author ) / Masson, S. ( author )
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Conference:European Workshop; 16th, Micromechanics; MME 16 ; 2005 ; Goteborg, Sweden
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Published in:Micromechanics; MME 16 , 6 ; S45-S53JOURNAL OF MICROMECHANICS AND MICROENGINEERING ; 16, 6 ; S45-S53
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Publisher:
- New search for: IoP
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Publication date:2006-01-01
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Size:S45-S53
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ISSN:
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Type of media:Conference paper
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Type of material:Print
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Language:English
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Keywords:
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Source:
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