Contour lithography methods for DRIE fabrication of nanometre-millimetre-scale coexisting microsystems (English)
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- New search for: Kubota, M.
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- New search for: Shibata, T.
- New search for: Mita, Y.
- New search for: Kubota, M.
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In:
Micromechanics; MME 16
6
;
S135-S141
;
2006
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ISSN:
- Conference paper / Print
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Title:Contour lithography methods for DRIE fabrication of nanometre-millimetre-scale coexisting microsystems
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Contributors:Mita, Y. ( author ) / Kubota, M. ( author ) / Harada, T. ( author ) / Marty, F. ( author ) / Saadany, B. ( author ) / Bourouina, T. ( author ) / Shibata, T. ( author )
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Conference:European Workshop; 16th, Micromechanics; MME 16 ; 2005 ; Goteborg, Sweden
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Published in:Micromechanics; MME 16 , 6 ; S135-S141JOURNAL OF MICROMECHANICS AND MICROENGINEERING ; 16, 6 ; S135-S141
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Publisher:
- New search for: IoP
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Publication date:2006-01-01
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Size:S135-S141
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ISSN:
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Type of media:Conference paper
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Type of material:Print
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Language:English
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Keywords:
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Source:
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