ULVAC research and development of Cat-CVD applications (English)
- New search for: Asari, S.
- New search for: Fujinaga, T.
- New search for: Takagi, M.
- New search for: Hashimoto, M.
- New search for: Saito, K.
- New search for: Harada, M.
- New search for: Ishikawa, M.
- New search for: Asari, S.
- New search for: Fujinaga, T.
- New search for: Takagi, M.
- New search for: Hashimoto, M.
- New search for: Saito, K.
- New search for: Harada, M.
- New search for: Ishikawa, M.
- New search for: Bouree, Jean-Eric
In:
International conference on Hot-wire CVD
5
;
541-544
;
2007
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ISSN:
- Conference paper / Print
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Title:ULVAC research and development of Cat-CVD applications
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Contributors:Asari, S. ( author ) / Fujinaga, T. ( author ) / Takagi, M. ( author ) / Hashimoto, M. ( author ) / Saito, K. ( author ) / Harada, M. ( author ) / Ishikawa, M. ( author ) / Bouree, Jean-Eric
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Conference:4th, International conference on Hot-wire CVD ; 2006 ; Takayama, Japan
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Published in:International conference on Hot-wire CVD , 5 ; 541-544THIN SOLID FILMS ; 516, 5 ; 541-544
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Publisher:
- New search for: Elsevier
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Publication date:2007-01-01
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Size:4 pages
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ISSN:
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Type of media:Conference paper
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Type of material:Print
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Language:English
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Keywords:
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Source:
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