The influence of the electrical asymmetry effect on deposition uniformity of thin silicon film (English)
- New search for: Hrunski, D.
- New search for: Janssen, A.
- New search for: Fritz, T.
- New search for: Hegemann, T.
- New search for: Clark, C.
- New search for: Schreiber, U.
- New search for: Grabosch, G.
- New search for: Hrunski, D.
- New search for: Janssen, A.
- New search for: Fritz, T.
- New search for: Hegemann, T.
- New search for: Clark, C.
- New search for: Schreiber, U.
- New search for: Grabosch, G.
- New search for: Meinema, Harry A.
- New search for: Spee, Karel (C)IMA
- New search for: Puetz, Joerg
In:
Coatings on glass and plastics
;
56-59
;
2013
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ISSN:
- Conference paper / Print
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Title:The influence of the electrical asymmetry effect on deposition uniformity of thin silicon film
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Contributors:Hrunski, D. ( author ) / Janssen, A. ( author ) / Fritz, T. ( author ) / Hegemann, T. ( author ) / Clark, C. ( author ) / Schreiber, U. ( author ) / Grabosch, G. ( author ) / Meinema, Harry A. / Spee, Karel (C)IMA / Puetz, Joerg
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Conference:International conference; 9th, Coatings on glass and plastics ; 2012 ; Breda, the Netherlands
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Published in:Coatings on glass and plastics ; 56-59THIN SOLID FILMS ; 532 ; 56-59
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Publisher:
- New search for: Elsevier Sequoia
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Place of publication:[Lausanne]
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Publication date:2013-01-01
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Size:4 pages
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Remarks:ESTAR title.
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ISSN:
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Type of media:Conference paper
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Type of material:Print
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Language:English
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Keywords:
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Source:
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