3-D finite element simulation of wafer thermal distortion and stress fields in exposure process (English)
- New search for: Lin, Z. C.
- New search for: Wu, W. J.
- New search for: Lin, Z. C.
- New search for: Wu, W. J.
In:
INTERNATIONAL JOURNAL OF HEAT AND MASS TRANSFER
;
45
, 3
;
619-630
;
2002
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ISSN:
- Article (Journal) / Print
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Title:3-D finite element simulation of wafer thermal distortion and stress fields in exposure process
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Contributors:Lin, Z. C. ( author ) / Wu, W. J. ( author )
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Published in:INTERNATIONAL JOURNAL OF HEAT AND MASS TRANSFER ; 45, 3 ; 619-630
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Publisher:
- New search for: PERGAMON PRESS
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Publication date:2002-01-01
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Size:12 pages
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ISSN:
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Type of media:Article (Journal)
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Type of material:Print
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Language:English
- New search for: 536.205 / 530
- Further information on Dewey Decimal Classification
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Classification:
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Source:
© Metadata Copyright the British Library Board and other contributors. All rights reserved.
Table of contents – Volume 45, Issue 3
The tables of contents are generated automatically and are based on the data records of the individual contributions available in the index of the TIB portal. The display of the Tables of Contents may therefore be incomplete.
- 465
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Experimental study of the convective heat transfer from in-line and staggered configurations of two wall-mounted cubesMeinders, E.R. et al. | 2002
- 483
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The influence of additive molecular weight and ionic nature on the pool boiling performance of aqueous surfactant solutionsWasekar, Vivek M. et al. | 2002
- 495
-
A model for high-pressure vaporization of droplets of complex liquid mixtures using continuous thermodynamicsZhu, Guang-Sheng et al. | 2002
- 509
-
A new mathematical method to solve highly coupled equations of heat and mass transfer in porous mediaMendes, N. et al. | 2002
- 519
-
Exploring injected droplet size effects on steady liquid penetration in a Diesel spray with a two-fluid modelIyer, V.A. et al. | 2002
- 533
-
Transient convective heat transfer of steam-water two-phase flow in a helical tube under pressure drop type oscillationsGuo, Lie-Jin et al. | 2002
- 543
-
Heat transfer and pressure drop for low Reynolds turbulent flow in helically dimpled tubesVicente, Pedro G. et al. | 2002
- 555
-
Enhancement of mass transfer in a two-layer Taylor-Couette apparatus with axial flowYarin, A.L. et al. | 2002
- 571
-
Heat transfer and friction coefficients in corrugated ducts confined by sinusoidal and arc curvesNiu, J.L. et al. | 2002
- 579
-
Calculating transient wall heat flux from measurements of surface temperatureReichelt, L. et al. | 2002
- 585
-
Flow characteristics on a heated rotating disc under natural convection dominant conditionsOgino, Fumimaru et al. | 2002
- 597
-
A study of CaCO3 fouling with a microscopic imaging techniqueTae Kim, Won et al. | 2002
- 609
-
Experimental and numerical study on a miniature Joule-Thomson cooler for steady-state characteristicsNg, K.C. et al. | 2002
- 619
-
3-D finite element simulation of wafer thermal distortion and stress fields in exposure processLin, Zone-Ching et al. | 2002
- 631
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Numerical simulation of bubbly two-phase flow in a narrow channelYang, Z.L. et al. | 2002
- 641
-
Fully developed mixed convection and flow reversal in a vertical rectangular duct with uniform wall heat fluxBarletta, A. et al. | 2002
- 655
-
Conjugated heat transfer in circular ducts with a power-law laminar convection fluid flowLuna, N. et al. | 2002
- 667
-
Active control of natural convection in a fluid layer with volume heat dissipationMarimbordes, T. et al. | 2002
- 679
-
Wall shear rate in the Taylor-Couette-Poiseuille flow at low axial Reynolds numberDumont, Eric et al. | 2002
- 691
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Visualization of boiling bubble dynamics using a flat uniformly heated transparent surfacePascual, C.C. et al. | 2002
- 697
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Radiative heat transfer in absorbing-emitting-scattering gray medium inside 1-D gray Cartesian enclosure using the collapsed dimension methodMishra, Subhash C. et al. | 2002