Transport and ionization of sputtered atoms in high-power impulse magnetron sputtering discharges (English)
- New search for: Kozak, T.
- New search for: Vlcek, J.
- New search for: Kos, S.
- New search for: Kozak, T.
- New search for: Vlcek, J.
- New search for: Kos, S.
In:
JOURNAL OF PHYSICS -LONDON- D APPLIED PHYSICS
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46
, 10
;
105203
;
2013
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ISSN:
- Article (Journal) / Print
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Title:Transport and ionization of sputtered atoms in high-power impulse magnetron sputtering discharges
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Contributors:
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Published in:JOURNAL OF PHYSICS -LONDON- D APPLIED PHYSICS ; 46, 10 ; 105203
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Publisher:
- New search for: IOP PUBLISHING LTD
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Publication date:2013-01-01
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Size:105203 pages
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ISSN:
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Type of media:Article (Journal)
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Type of material:Print
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Language:English
- New search for: 530
- Further information on Dewey Decimal Classification
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Classification:
DDC: 530 -
Source:
© Metadata Copyright the British Library Board and other contributors. All rights reserved.
Table of contents – Volume 46, Issue 10
The tables of contents are generated automatically and are based on the data records of the individual contributions available in the index of the TIB portal. The display of the Tables of Contents may therefore be incomplete.
- 102001
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Surface roughness development on ArF-photoresist studied by beam-irradiation of CF4 plasmaTakuya Takeuchi / Kenji Ishikawa / Yuichi Setsuhara / Keigo Takeda / Hiroki Kondo / Makoto Sekine / Masaru Hori et al. | 2013
- 105001
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Morphology dependence of electron spin resonance investigation on structure controllable hollow La0.7Sr0.3MnO3 nanofibresYi Zhang / Weiwei Pan / Juan Dong / Zhenkun Wang / Qingfang Liu / Jianbo Wang et al. | 2013
- 105002
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The effect of flow maldistribution in heterogeneous parallel-plate active magnetic regeneratorsK K Nielsen / C R H Bahl / K Engelbrecht et al. | 2013
- 105003
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Surface functionalized LSMO nanoparticles with improved colloidal stability for hyperthermia applicationsN D Thorat / V M Khot / A B Salunkhe / A I Prasad / R S Ningthoujam / S H Pawar et al. | 2013
- 105004
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Influence of annealing on the local structure, magnetic and transport properties of Mn-doped SiC filmsYukai An / Shiqi Wang / Deqiang Feng / Yongzhen Huang / Zichuan Qin / Xiang Li / Zhonghua Wu / Jiwen Liu et al. | 2013
- 105005
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Magnetic phase transitions in Gd64Sc36 studied using non-contact ultrasonicsOksana Trushkevych / Yichao Fan / Robert Perry / Rachel S Edwards et al. | 2013
- 105101
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Epitaxial growth of 2 inch diameter homogeneous AlN single-crystalline films by pulsed laser depositionHui Yang / Wenliang Wang / Zuolian Liu / Guoqiang Li et al. | 2013
- 105102
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Low-temperature thermal nanoimprint lithography of anti-reflective structures for flexible low band gap organic solar cellsJ Kettle / A Rees / E B Brousseau / M Horie et al. | 2013
- 105103
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Silicon homojunction solar cells via a hydrogen plasma etching processS Q Xiao / S Xu / H P Zhou / D Y Wei / S Y Huang / L X Xu / C C Sern / Y N Guo / S Khan / Y Xu et al. | 2013
- 105104
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Integrated optics nano-opto-fluidic sensor based on whispering gallery modes for picoliter volume refractometryGiovanni Gilardi / Romeo Beccherelli et al. | 2013
- 105201
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Non-equilibrium nanosecond-pulsed plasma generation in the liquid phase (water, PDMS) without bubbles: fast imaging, spectroscopy and leader-type modelDanil Dobrynin / Yohan Seepersad / Mikhail Pekker / Mikhail Shneider / Gary Friedman / Alexander Fridman et al. | 2013
- 105202
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Role of quenching of metastable states in acetaldehyde decomposition by a non-equilibrium nitrogen plasma at sub-atmospheric pressureW Faider / S Pasquiers / N Blin-Simiand / L Magne et al. | 2013
- 105203
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Transport and ionization of sputtered atoms in high-power impulse magnetron sputtering dischargesTomáš Kozák / Jaroslav Vlček / Šimon Kos et al. | 2013
- 105301
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Preferential growth and enhanced dielectric properties of Ba0.7Sr0.3TiO3 thin films with preannealed Pt bottom electrodeXiaohong Zhu / Emmanuel Defaÿ / Marc Aïd / Yinjuan Ren / Caiyun Zhang / Jiliang Zhu / Jianguo Zhu / Dingquan Xiao et al. | 2013
- 105302
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Variable infrared emittance of Sr-incorporated Sm1−xSrxCoO3 (0.1 ⩽ x ⩽ 0.9)Le Chen / Chunhua Lu / Zhenggang Fang / Yi Lu / Yaru Ni / Zhongzi Xu et al. | 2013
- 105302
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Variable infrared emittance of Sr-incorporated Sm1-xSrxCoO3 (0.1Chen, L. / Lu, C. / Fang, Z. / Lu, Y. / Ni, Y. / Xu, Z. et al. | 2013
- 105303
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The evolution of structural and electronic properties during the glass transition process of Al–Ni–Nd alloyH J Chang / L F Chen / X F Zhu et al. | 2013
- 105304
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Ferroelectric characterization of aligned barium titanate nanofibresPedro Sá / Jose Barbosa / Igor Bdikin / Bernardo Almeida / Anabela G Rolo / Etelvina de Matos Gomes / Michael Belsley / Andrei L Kholkin / Dmitry Isakov et al. | 2013
- 105305
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Lateral-crack-free, buckled, inkjet-printed silver electrodes on highly pre-stretched elastomeric substratesJaemyon Lee / Seungjun Chung / Hyunsoo Song / Sangwoo Kim / Yongtaek Hong et al. | 2013
- 105306
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Effect of oxygen vacancy on Li-ion diffusion in a V2O5 cathode: a first-principles studyW Y Ma / B Zhou / J F Wang / X D Zhang / Z Y Jiang et al. | 2013
- 105307
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Role of material properties and mechanical constraint on stress-assisted diffusion in plate electrodes of lithium ion batteriesYicheng Song / Xianjun Shao / Zhansheng Guo / Junqian Zhang et al. | 2013
- 105501
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Enhanced sensitivity to dielectric function and thickness of absorbing thin films by combining total internal reflection ellipsometry with standard ellipsometry and reflectometryA Lizana / M Foldyna / M Stchakovsky / B Georges / D Nicolas / E Garcia-Caurel et al. | 2013
- 105502
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Selective removal of CuIn1−xGaxSe2 absorber layer with no edge melting using a nanosecond Nd : YAG laserS H Lee / C K Kim / J H In / H S Shim / S H Jeong et al. | 2013
- 105503
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New methods to determine temperatures from UV OH spectrumGrégoire de Izarra / Jean-Marie Cormier et al. | 2013