Scalloping and stress concentration in DRIE-manufactured comb-drives (English)
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- New search for: Bertini, Silvia
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Title:Scalloping and stress concentration in DRIE-manufactured comb-drives
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Contributors:Bertini, Silvia ( author ) / Verotti, Matteo ( author ) / Bagolini, Alvise ( author ) / Bellutti, Pierliugi ( author ) / Ruta, Giuseppe ( author ) / Belfiore, Nicola ( author ) / Bertini, Silvia / Verotti, Matteo / Bagolini, Alvise / Bellutti, Pierliugi
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Publication date:2018-01-01
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DOI:
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Type of media:Article (Journal)
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Type of material:Electronic Resource
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Language:English
- New search for: 621
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DDC: 621 -
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