Computer generated holography for 3D lithographic illumination (English)
- New search for: Fischer, David
- Further information on Fischer, David:
- http://d-nb.info/gnd/1247035972
- New search for: Fischer, David
- Further information on Fischer, David:
- http://d-nb.info/gnd/1247035972
- New search for: Thüringer Universitäts- Und Landesbibliothek Jena
- New search for: Sinzinger, Stefan
- Further information on Sinzinger, Stefan:
- http://d-nb.info/gnd/13000930X
- New search for: Schierz, Christoph
- Further information on Schierz, Christoph:
- http://d-nb.info/gnd/133790525
- New search for: Heinrich, Andreas
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2021
- Miscellaneous / Electronic Resource
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Title:Computer generated holography for 3D lithographic illumination
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Contributors:Fischer, David ( author ) / Thüringer Universitäts- Und Landesbibliothek Jena ( host institution ) / Sinzinger, Stefan ( tutor ) / Schierz, Christoph ( tutor ) / Heinrich, Andreas ( tutor )
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Publisher:
- New search for: TU Ilmenau
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Publication date:2021
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DOI:
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Type of media:Miscellaneous
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Type of material:Electronic Resource
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Language:English
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Keywords:
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Source: