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Inhomogeneity of induced uniaxial anisotropy in evaporated Permalloy thin films is found to be divided roughly into two classes, namely, intrinsic and extrinsic inhomogeneities; former, which is short wavelength component of anisotropy change and results in magnetization ripple, is found to originate mainly from randomly oriented magnetocrystalline anisotropy and magnetoelastic anisotropy in crystallites; latter, long wavelength component of anisotropy change, seems to result from same origin as that of skew; annealing experiments of intrinsic angular dispersion showed that activation energy of relaxation process was about 0.5 ev; this result suggests that magnetoelastic anisotropy originates mostly from stress due to divacancies and/or dislocations. (43680)