Controlling temperature in substrate processing systems (English)
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- New search for: ROCHA-ALVAREZ JUAN CARLOS
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- New search for: ROCHA-ALVAREZ JUAN CARLOS
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2015
- Patent / Electronic Resource
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Title:Controlling temperature in substrate processing systems
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Patent number:CN104813440
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Patent applicant:
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Patent family:
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Contributors:ROCHA-ALVAREZ JUAN CARLOS ( author ) / BANSAL AMIT KUMAR ( author ) / BALASUBRAMANIAN GANESH ( author ) / J ZHOU ( author ) / SANKARAKRISHNAN RAMPRAKASH ( author )
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Publisher:
- New search for: Europäisches Patentamt
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Publication date:2015-07-29
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Type of media:Patent
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Type of material:Electronic Resource
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Language:English
- New search for: H01L
- Further information on International Patent Classification
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Classification:
IPC: H01L Halbleiterbauelemente, SEMICONDUCTOR DEVICES -
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