Semiconductor device and manufacturing method thereof (Chinese)
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2021
- Patent / Electronic Resource
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Title:Semiconductor device and manufacturing method thereof
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Additional title:半导体器件及其制作方法
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Patent number:CN112520689
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Patent applicant:
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Patent family:
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Contributors:WANG XINLONG ( author )
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Publisher:
- New search for: Europäisches Patentamt
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Publication date:2021-03-19
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Type of media:Patent
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Type of material:Electronic Resource
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Language:Chinese
- New search for: B81C / B81B
- Further information on International Patent Classification
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Classification:
IPC: B81C Verfahren oder Geräte besonders ausgebildet zur Herstellung oder Behandlung von Mikrostrukturbauelementen oder -systemen, PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS / B81B Mikrostrukturbauelemente oder -systeme, z.B. mikromechanische Bauelemente, MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES -
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