Sputtering process stability evaluation method (Chinese)
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- New search for: TIAN JIAJIA
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2023
- Patent / Electronic Resource
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Title:Sputtering process stability evaluation method
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Additional title:一种溅射工艺稳定性评估方法
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Patent number:CN115976484
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Patent applicant:
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Patent family:
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Contributors:ZHANG YIFAN ( author ) / TIAN JIAJIA ( author )
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Publisher:
- New search for: Europäisches Patentamt
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Publication date:2023-04-18
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Type of media:Patent
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Type of material:Electronic Resource
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Language:Chinese
- New search for: C23C
- Further information on International Patent Classification
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Classification:
IPC: C23C Beschichten metallischer Werkstoffe, COATING METALLIC MATERIAL -
Source: