Method for monitoring annealing uniformity of chip (Chinese)
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- New search for: WANG SHAOWEI
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2023
- Patent / Electronic Resource
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Title:Method for monitoring annealing uniformity of chip
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Additional title:一种芯片退火均匀性的监控方法
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Patent number:CN116995155
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Patent applicant:
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Patent family:
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Contributors:WANG SHAOWEI ( author ) / LUO HONGBO ( author ) / ZHANG SHUANG ( author ) / ZHENG ZHIQIANG ( author ) / HOU RUIQIANG ( author )
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Publisher:
- New search for: Europäisches Patentamt
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Publication date:2023-11-03
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Type of media:Patent
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Type of material:Electronic Resource
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Language:Chinese
- New search for: H01L
- Further information on International Patent Classification
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Classification:
IPC: H01L Halbleiterbauelemente, SEMICONDUCTOR DEVICES -
Source: