Self-focusing capacitive micromechanical ultrasonic sensor device and preparation method thereof (Chinese)
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- New search for: WANG JIUJIANG
- New search for: YU YUANYU
- New search for: ZHANG SHUANG
- New search for: WANG JIUJIANG
- New search for: YU YUANYU
- New search for: ZHANG SHUANG
2023
- Patent / Electronic Resource
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Title:Self-focusing capacitive micromechanical ultrasonic sensor device and preparation method thereof
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Additional title:一种自聚焦电容性微机械超声传感器器件及制备方法
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Patent number:CN117019606
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- New search for: Europäisches Patentamt
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Publication date:2023-11-10
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Type of media:Patent
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Type of material:Electronic Resource
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Language:Chinese
- New search for: B06B / B81B / B81C
- Further information on International Patent Classification
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Classification:
IPC: B06B GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS IN GENERAL, Erzeugen oder Übertragen mechanischer Schwingungen allgemein / B81B Mikrostrukturbauelemente oder -systeme, z.B. mikromechanische Bauelemente, MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES / B81C Verfahren oder Geräte besonders ausgebildet zur Herstellung oder Behandlung von Mikrostrukturbauelementen oder -systemen, PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS -
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