Integrated epitaxy and pre-cleaning system (Chinese)
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- New search for: HAWRYLCHAK LAURA
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- New search for: HAWRYLCHAK LAURA
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2024
- Patent / Electronic Resource
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Title:Integrated epitaxy and pre-cleaning system
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Additional title:集成外延与预清洁系统
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Patent number:CN117448783
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Patent applicant:
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Patent family:
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Contributors:HAWRYLCHAK LAURA ( author ) / CHU SCHUBERT S ( author ) / MANDREKAR TUSHAR ( author ) / SANCHEZ ERROL C ( author ) / LO KIN PONG ( author )
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Publisher:
- New search for: Europäisches Patentamt
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Publication date:2024-01-26
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Type of media:Patent
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Type of material:Electronic Resource
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Language:Chinese
- New search for: C23C
- Further information on International Patent Classification
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Classification:
IPC: C23C Beschichten metallischer Werkstoffe, COATING METALLIC MATERIAL -
Source: