TRANSFER ROBOT FOR TRANSFERRING SUBSTRATE IN VACCUM CHAMBER (Korean)
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2022
- Patent / Electronic Resource
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Title:TRANSFER ROBOT FOR TRANSFERRING SUBSTRATE IN VACCUM CHAMBER
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Additional title:진공 챔버에서 기판을 이송하기 위한 기판 이송 로봇
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Patent number:KR102348261
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Patent applicant:
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Patent family:
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Contributors:LEE SOO JONG ( author ) / KIM MYUNG JIN ( author ) / LEE CHANG SEONG ( author ) / BAEK SEUNG YOUNG ( author ) / JEE CHANG HYUN ( author ) / HAM SANG HWI ( author ) / HUR MOON GI ( author ) / PARK JAE HYUN ( author ) / LEE TAE HAN ( author )
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Publisher:
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Publication date:2022-01-10
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Type of media:Patent
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Type of material:Electronic Resource
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Language:Korean
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