OPTICAL INSPECTION SYSTEM COMPRISING INTERFEROMETER (Korean)
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- New search for: LEE JOO HYUNG
- New search for: LEE JOO HYUNG
2022
- Patent / Electronic Resource
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Title:OPTICAL INSPECTION SYSTEM COMPRISING INTERFEROMETER
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Additional title:간섭계를 포함하는 광학 검사 시스템
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Patent number:KR20220095977
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Patent applicant:
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Patent family:
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Contributors:LEE JOO HYUNG ( author )
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Publisher:
- New search for: Europäisches Patentamt
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Publication date:2022-07-07
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Type of media:Patent
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Type of material:Electronic Resource
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Language:Korean
- New search for: G01B
- Further information on International Patent Classification
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Classification:
IPC: G01B MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS, Messen der Länge, der Dicke oder ähnlicher linearer Abmessungen -
Source: