FILM FORMING APPARATUS AND FILM FORMING METHOD (Korean)
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- New search for: MATSUMOTO YUKIO
- New search for: ISHII HIROSHI
- New search for: MATSUMOTO YUKIO
- New search for: ISHII HIROSHI
2023
- Patent / Electronic Resource
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Title:FILM FORMING APPARATUS AND FILM FORMING METHOD
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Additional title:성막 장치 및 성막 방법
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Patent number:KR20230090239
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Patent applicant:
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Patent family:
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Contributors:MATSUMOTO YUKIO ( author ) / ISHII HIROSHI ( author )
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Publisher:
- New search for: Europäisches Patentamt
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Publication date:2023-06-21
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Type of media:Patent
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Type of material:Electronic Resource
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Language:Korean
- New search for: C23C / H01J
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Classification:
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