규소 전구체 (Korean)
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2024
- Patent / Electronic Resource
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Title:규소 전구체
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Patent number:KR20240050393
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Patent applicant:
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Patent family:
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Contributors:LEE SANGJIN ( author ) / RYU MINSEOK ( author ) / HAN SANGBUM ( author ) / KIM SEONGCHEOL ( author ) / KIM YOONHAE ( author ) / PARK KIEJIN ( author ) / YEON YERIM ( author ) / CHO SUNGSIL ( author ) / KIM HWANSOO ( author ) / CHOI JOONGKI ( author )
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Publisher:
- New search for: Europäisches Patentamt
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Publication date:2024-04-18
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Type of media:Patent
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Type of material:Electronic Resource
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Language:Korean
- New search for: C07F / C23C / H01L
- Further information on International Patent Classification
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Classification:
IPC: C07F Acyclische, carbocyclische oder heterocyclische Verbindungen, die andere Elemente als Kohlenstoff, Wasserstoff, Halogen, Sauerstoff, Stickstoff, Schwefel, Selen oder Tellur enthalten, ACYCLIC, CARBOCYCLIC, OR HETEROCYCLIC COMPOUNDS CONTAINING ELEMENTS OTHER THAN CARBON, HYDROGEN, HALOGEN, OXYGEN, NITROGEN, SULFUR, SELENIUM OR TELLURIUM / C23C Beschichten metallischer Werkstoffe, COATING METALLIC MATERIAL / H01L Halbleiterbauelemente, SEMICONDUCTOR DEVICES -
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