Charged particle beam device and operation method therefor (English)
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- New search for: NAGASHIMA TOMOHARU
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- New search for: NAGASHIMA TOMOHARU
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2024
- Patent / Electronic Resource
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Title:Charged particle beam device and operation method therefor
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Patent number:US11961701
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Patent applicant:
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Patent family:
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Contributors:NAGASHIMA TOMOHARU ( author ) / IKEDA KAZUKI ( author ) / LI WEN ( author ) / WADA MASASHI ( author ) / KAWANO HAJIME ( author )
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Publisher:
- New search for: Europäisches Patentamt
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Publication date:2024-04-16
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Type of media:Patent
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Type of material:Electronic Resource
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Language:English
- New search for: H01J / G06F
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Classification:
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