FEEDFORWARD TEMPERATURE CONTROL FOR PLASMA PROCESSING APPARATUS (English)
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2016
- Patent / Electronic Resource
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Title:FEEDFORWARD TEMPERATURE CONTROL FOR PLASMA PROCESSING APPARATUS
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Patent number:US2016155612
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Patent applicant:
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Patent family:
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Contributors:MAHADESWARASWAMY CHETAN ( author ) / MERRY WALTER R ( author ) / SHOJI SERGIO FUKUDA ( author ) / ZHANG CHUNLEI ( author ) / PATTAR YASHASWINI ( author ) / NGUYEN DUY D ( author ) / TSONG TINA ( author ) / NEVIL SHANE C ( author ) / BUCHBERGER JR DOUGLAS A ( author ) / SILVEIRA FERNANDO M ( author )
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Publisher:
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Publication date:2016-06-02
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Type of media:Patent
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Type of material:Electronic Resource
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Language:English
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