Reduced Spatial/Temporal Overlaps to Increase Temporal Overlaps to Increase Precision in Focused Ion Beam FIB Instruments for Milling And Imaging and Focused Ion Beams for Lithography (English)
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- New search for: BROWNING NIGEL D
- New search for: NICHOLLS DANIEL
- New search for: BROWNING NIGEL D
- New search for: NICHOLLS DANIEL
2023
- Patent / Electronic Resource
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Title:Reduced Spatial/Temporal Overlaps to Increase Temporal Overlaps to Increase Precision in Focused Ion Beam FIB Instruments for Milling And Imaging and Focused Ion Beams for Lithography
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Patent number:US2023011739
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Patent applicant:
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Patent family:
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Contributors:BROWNING NIGEL D ( author ) / NICHOLLS DANIEL ( author )
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Publisher:
- New search for: Europäisches Patentamt
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Publication date:2023-01-12
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Type of media:Patent
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Type of material:Electronic Resource
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Language:English
- New search for: H01J / G03F
- Further information on International Patent Classification
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Classification:
IPC: H01J Elektrische Entladungsröhren oder Entladungslampen, ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS / G03F Fotomechanische Herstellung strukturierter oder gemusterter Oberflächen, z.B. zum Drucken, zum Herstellen von Halbleiterbauelementen, PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES -
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