Method of generating write data, multi charged particle beam writing apparatus, and pattern inspection apparatus (English)
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- New search for: YASUI KENICHI
- New search for: HARA SHIGEHIRO
- New search for: YASUI KENICHI
- New search for: HARA SHIGEHIRO
2017
- Patent / Electronic Resource
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Title:Method of generating write data, multi charged particle beam writing apparatus, and pattern inspection apparatus
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Patent number:US9558315
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Patent applicant:
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Patent family:
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Contributors:YASUI KENICHI ( author ) / HARA SHIGEHIRO ( author )
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Publisher:
- New search for: Europäisches Patentamt
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Publication date:2017-01-31
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Type of media:Patent
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Type of material:Electronic Resource
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Language:English
- New search for: H01J / G06F
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