A boron etch-stop assisted lateral silicon etching process for improved high-aspect-ratio silicon micromachining and its applications (English)
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In:
Journal of Micromechanics and Microengineering
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12
, 5
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574-581
;
2002
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ISSN:
- Article (Journal) / Print
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Title:A boron etch-stop assisted lateral silicon etching process for improved high-aspect-ratio silicon micromachining and its applications
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Contributors:
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Published in:Journal of Micromechanics and Microengineering ; 12, 5 ; 574-581
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Publisher:
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Publication date:2002
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Size:8 Seiten, 12 Bilder, 20 Quellen
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ISSN:
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DOI:
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Type of media:Article (Journal)
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Type of material:Print
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Language:English
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Keywords:
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Source:
Table of contents – Volume 12, Issue 5
The tables of contents are generated automatically and are based on the data records of the individual contributions available in the index of the TIB portal. The display of the Tables of Contents may therefore be incomplete.
- 505
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Design and analysis of a microelectromagnetic vibration transducer used as an implantable middle ear hearing aidSekwang Park / Ki-Chan Lee et al. | 2002
- 512
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Web-based knowledge-intensive support framework for collaborative design of MEMSXuan F Zha / H Du et al. | 2002
- 512
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Web-baed knowledge-intensive support framework for collaborative design of MEMSZha, X.F. / Du, H. et al. | 2002
- 525
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Fabrication of star grooves and rhombus grooves micro heat pipeShung-Wen Kang / Derlin Huang et al. | 2002
- 532
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The effects of electro-discharge machining block electrode method for microelectrode machiningNachiappan Ravi / Shan Xue Chuan et al. | 2002
- 541
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Meandering ‘string-like’ features observed in an anodic bondGlenn E Spangler / Edward S Kolesar et al. | 2002
- 548
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A simple method for determining linear thermal expansion coefficients of thin filmsChi Hsiang Pan et al. | 2002
- 556
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Squeeze film damping effect on a MEMS torsion mirrorKuo-Ming Chang / Shun-Ching Lee / Shyh-Horng Li et al. | 2002
- 562
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A new electrical residual stress characterization using bent beam actuatorsSeonho Seok / Byeungleul Lee / Kukjin Chun et al. | 2002
- 567
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The impacts of time-step size in the application of the direct simulation Monte Carlo method to ultra-thin gas film lubricationEddie Yin-Kwee Ng / Ningyu Liu et al. | 2002
- 574
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A boron etch-stop assisted lateral silicon etching process for improved high-aspect-ratio silicon micromachining and its applicationsJerwei Hsieh / Weileun Fang et al. | 2002
- 582
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Fabrication of monolithic piezoelectric drive units for a miniature robotUrban Simu / Stefan Johansson et al. | 2002
- 590
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A new fabrication process for ultra-thick microfluidic microstructures utilizing SU-8 photoresistChe-Hsin Lin / Gwo-Bin Lee / Bao-Wen Chang / Guan-Liang Chang et al. | 2002
- 598
-
Vibration characteristic identification by experiment of a new disc-type ultrasonic statorPuu-An Juang / Werner Brenner et al. | 2002
- 604
-
Simulation of the filling process in micro channels for polymeric materialsDonggang Yao / Byung Kim et al. | 2002
- 611
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A low-temperature wafer bonding technique using patternable materialsC-T Pan / H Yang / S-C Shen / M-C Chou / H-P Chou et al. | 2002
- 616
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Fine tuning the roughness of powder blasted surfacesHenk Wensink / Stefan Schlautmann / Martijn H Goedbloed / Miko C Elwenspoek et al. | 2002
- 621
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Advanced sacrificial poly-Si technology for fluidic systemsJ W Berenschot / N R Tas / T S J Lammerink / M Elwenspoek / A van den Berg et al. | 2002
- 625
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A compact model for electroosmotic flows in microfluidic devicesR Qiao / N R Aluru et al. | 2002
- 636
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Development of a multiple-microhole aerostatic air bearing systemKuang-Chao Fan / Chi-Chung Ho / Jong-I Mou et al. | 2002
- 644
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Bonding of silicon scanning mirror having vertical comb fingersJin-Ho Lee / Young-Chul Ko / Byoung-So Choi / Jong-Min Kim / Duk Young Jeon et al. | 2002
- 650
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A novel 3D process for single-crystal silicon micro-probe structuresSangjun Park / Bonghwan Kim / Jongpal Kim / Seungjoon Paik / Byoung-Doo Choi / Ilwoo Jung / Kukjin Chun / Dong-il ‘Dan’ Cho et al. | 2002
- 655
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Design and fabrication of artificial lateral line flow sensorsZhifang Fan / Jack Chen / Jun Zou / David Bullen / Chang Liu / Fred Delcomyn et al. | 2002
- 662
-
Geometry-based macro-tool evaluation of non-moving-part valvular microchannelsChristian Feldt / Larry Chew et al. | 2002
- 670
-
Heat transfer and quenching analysis of combustion in a micro combustion vesselDae Hoon Lee / Sejin Kwon et al. | 2002
- 677
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Determining local residual strains of polydimethylsiloxane using ink dots, and stiffening polydimethylsiloxane using SU-8 particlesCheng Luo / John Garra / Thomas W Schneider / Robert White / John Currie / Makarand Paranjape et al. | 2002
- 682
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Development of micromachined hollow tips for protein analysis based on nanoelectrospray ionization mass spectrometryPatrick Griss / Jessica Melin / Johan Sjödahl / Johan Roeraade / Göran Stemme et al. | 2002
- 688
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Continuous anti-stiction coatings using self-assembled monolayers for gold microstructuresJung-Mu Kim / Chang-Wook Baek / Jae-Hyoung Park / Dong-Sik Shin / Yoon-Sik Lee / Yong-Kweon Kim et al. | 2002
- 696
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Adaptive contact for improving the behavior of silicon MEMS switchesLu Miao / Zhao Zhengping / Hu Xiaodong / Zou Xuefeng / Lin Haifeng / Guo Ronghui et al. | 2002
- 702
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A physical model to predict stiction in MEMSW Merlijn van Spengen / Robert Puers / Ingrid De Wolf et al. | 2002
- 714
-
Fracture analysis of thick plasma-enhanced chemical vapor deposited oxide films for improving the structural integrity of power MEMSK-S Chen / J-Y Chen / S-Y Lin et al. | 2002
- N19
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A miniaturized glow discharge applied for optical emission detection in aqueous analytesG Jenkins / A Manz et al. | 2002
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TECHNICAL NOTE: A miniaturized glow discharge applied for optical emission detection in aqueous analytesJenkins, G. et al. | 2002