Single crystal silicon nano-wire piezoresistors for mechanical sensors (English)
- New search for: Toriyama, T.
- New search for: Tanimoto, Y.
- New search for: Sugiyama, S.
- New search for: Toriyama, T.
- New search for: Tanimoto, Y.
- New search for: Sugiyama, S.
In:
Journal of Microelectromechanical Systems
;
11
, 5
;
605-611
;
2002
-
ISSN:
- Article (Journal) / Print
-
Title:Single crystal silicon nano-wire piezoresistors for mechanical sensors
-
Contributors:
-
Published in:Journal of Microelectromechanical Systems ; 11, 5 ; 605-611
-
Publisher:
-
Publication date:2002
-
Size:7 Seiten, 24 Quellen
-
ISSN:
-
Coden:
-
DOI:
-
Type of media:Article (Journal)
-
Type of material:Print
-
Language:English
-
Keywords:
-
Source:
Table of contents – Volume 11, Issue 5
The tables of contents are generated automatically and are based on the data records of the individual contributions available in the index of the TIB portal. The display of the Tables of Contents may therefore be incomplete.
- 407
-
EditorialMuller, R.S. et al. | 2002
- 408
-
Surface micromachined paraffin-actuated microvalveCarlen, E.T. / Mastrangelo, C.H. et al. | 2002
- 421
-
A pneumatically actuated full in-channel microvalve with MOSFET-like function in fluid channel networksTakao, H. / Ishida, M. / Sawada, K. et al. | 2002
- 427
-
A high-resolution high-frequency monolithic top-shooting microinjector free of satellite drops - part I: concept, design, and modelFan-Gang Tseng, / Chang-Jin Kim, / Chih-Ming Ho, et al. | 2002
- 437
-
A high-resolution high-frequency monolithic top-shooting microinjector free of satellite drops - part II: fabrication, implementation, and characterizationFan-Gang Tseng, / Chang-Jin Kim, / Chih-Ming Ho, et al. | 2002
- 448
-
Bubble-free electrokinetic pumpingSelvaganapathy, P. / Yit-shun Leung Ki, / Renaud, P. / Mastrangelo, C.H. et al. | 2002
- 454
-
A surface-tension driven micropump for low-voltage and low-power operationsKwang-Seok Yun, / Il-Joo Cho, / Jong-Uk Bu, / Chang-Jin Kim, / Euisik Yoon, et al. | 2002
- 462
-
A magnetic microstirrer and array for microfluidic mixingLiang-Hsuan Lu, / Kee Suk Ryu, / Chang Liu, et al. | 2002
- 470
-
Micromachined silicon nitride solid immersion lensCrozier, K.B. / Fletcher, D.A. / Kino, G.S. / Quate, C.F. et al. | 2002
- 479
-
Measurement system for full three-dimensional motion characterization of MEMSRembe, C. / Muller, R.S. et al. | 2002
- 489
-
Measurements of material properties using differential capacitive strain sensorsChu, L.L. / Long Que, / Gianchandani, Y.B. et al. | 2002
- 499
-
Thermoelastic damping in fine-grained polysilicon flexural beam resonatorsSrikar, V.T. / Senturia, S.D. et al. | 2002
- 505
-
MEMS resonators that are robust to process-induced feature width variationsRong Liu, / Paden, B. / Turner, K. et al. | 2002
- 512
-
A thermomechanical model for adhesion reduction of MEMS cantileversRogers, J.W. / Mackin, T.J. / Phinney, L.M. et al. | 2002
- 521
-
Microfabrication of high-aspect ratio and complex monolithic structures in glassBelloy, E. / Pawlowski, A.-G. / Sayah, A. / Gijs, M.A.M. et al. | 2002
- 528
-
Uncooled multimirror broad-band infrared microbolometersAlmasri, M. / Celik-Butler, Z. / Butler, D.P. / Yaradanakul, A. / Yildiz, A. et al. | 2002
- 536
-
Development and characterization of micromachined hollow cathode plasma display devicesJack Chen, / Sung-Jin Park, / Zhifang Fan, / Eden, J.G. / Chang Liu, et al. | 2002
- 544
-
Equilibrium swelling and kinetics of pH-responsive hydrogels: models, experiments, and simulationsDe, S.K. / Aluru, N.R. / Johnson, B. / Crone, W.C. / Beebe, D.J. / Moore, J. et al. | 2002
- 556
-
Vacuum packaging technology using localized aluminum/silicon-to-glass bondingCheng, Y.-T. / Wan-Tai Hsu, / Najafi, K. / Nguyen, C.T.-C. / Liwei Lin, et al. | 2002
- 566
-
On-chip actuation of an in-plane compliant bistable micromechanismBaker, M.S. / Howell, L.L. et al. | 2002
- 574
-
Optical actuation of a bistable MEMSSulfridge, M. / Saif, T. / Miller, N. / O'Hara, K. et al. | 2002
- 584
-
Dynamics of a microflight mechanism with magnetic rotational wings in an alternating magnetic fieldMiki, N. / Shimoyama, I. et al. | 2002
- 592
-
Elimination of stress-induced curvature in thin-film structuresBifano, T.G. / Johnson, H.T. / Bierden, P. / Mali, R.K. et al. | 2002
- 598
-
Analysis of piezoresistance in p-type silicon for mechanical sensorsToriyama, T. / Sugiyama, S. et al. | 2002
- 605
-
Single crystal silicon nano-wire piezoresistors for mechanical sensorsToriyama, T. / Tanimoto, Y. / Sugiyama, S. et al. | 2002
- 612
-
An efficient DIPIE algorithm for CAD of electrostatically actuated MEMS devicesBochobza-Degani, O. / Elata, D. / Nemirovsky, Y. et al. | 2002
- 621
-
Boston Transducers '03| 2002
- 622
-
2002 IEEE International Electron Devices Meeting| 2002
- 623
-
MEMS and Nanotechnology in the "Big Easy"| 2002