Intellectual property rights in nanotechnology (English)
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In:
Thin Solid Films
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420-421
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472-477
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2002
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ISSN:
- Article (Journal) / Print
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Title:Intellectual property rights in nanotechnology
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Contributors:Bastani, B. ( author ) / Fernandez, D. ( author )
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Published in:Thin Solid Films ; 420-421 ; 472-477
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Publisher:
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Publication date:2002
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Size:6 Seiten, 21 Quellen
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ISSN:
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Coden:
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DOI:
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Type of media:Article (Journal)
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Type of material:Print
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Language:English
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Keywords:
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Source:
Table of contents – Volume 420-421
The tables of contents are generated automatically and are based on the data records of the individual contributions available in the index of the TIB portal. The display of the Tables of Contents may therefore be incomplete.
- 1
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A new method for vacuum deposition of polymer filmsAffinito, J. et al. | 2002
- 8
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Investigation of sputtered HfF4 films and application to interference filters for thermophotovoltaicsMartin, P. M. / Olsen, L. C. / Johnston, J. W. / Depoy, D. M. et al. | 2002
- 13
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Photoluminescence from highly oriented MgxZn1-xO films grown by chemical spray pyrolysisTerasako, T. / Shirakata, S. / Kariya, T. et al. | 2002
- 318
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Investigation of the residual stresses and mechanical properties of (Cr,Al)N arc PVD coatings used for semi-solid metal (SSM) forming diesLugscheider, E. / Bobzin, K. / Hornig, T. / Maes, M. et al. | 2002
- 19
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Photoelectric and optical properties of pentacene films deposited on n-Si by thermal evaporationKim, S. S. / Park, S. P. / Kim, J. H. / Im, S. et al. | 2002
- 23
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Growth and characterization of OLED with samarium complex as emitting and electron transporting layerReyes, R. / Hering, E. N. / Cremona, M. / da Silva, C. F. / Brito, H. F. / Achete, C. A. et al. | 2002
- 30
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Hetero-epitaxial growth and optical properties of LaF3 on CaF2Taki, Y. / Muramatsu, K. et al. | 2002
- 38
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Metallization of ceramic vacuum chambers for SNS ring injection kicker magnetsHe, P. / Hseuh, H. C. / Todd, R. J. et al. | 2002
- 43
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Sputter deposition of silicon-oxide coatingsJankowski, A. F. / Hayes, J. P. / Felter, T. E. / Evans, C. / Nelson, A. J. et al. | 2002
- 47
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Zirconia and zirconia-silica thin films deposited by magnetron sputteringKuo, D. H. / Chien, C. H. / Huang, C. H. et al. | 2002
- 54
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Properties of nickel oxide thin films deposited by RF reactive magnetron sputteringLu, Y. M. / Hwang, W. S. / Yang, J. S. / Chuang, H. C. et al. | 2002
- 62
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Effect of frequency and pulse width on the properties of ta:C films prepared by FCVA together with substrate pulse biasingSheeja, D. / Tay, B. K. / Yu, L. J. / Lau, S. P. / Sze, J. Y. / Cheong, C. K. et al. | 2002
- 70
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Amorphous ITO thin films prepared by DC sputtering for electrochromic applicationsTeixeira, V. / Cui, H. N. / Meng, L. J. / Fortunato, E. / Martins, R. et al. | 2002
- 76
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Investigation of annealing effects on sol-gel deposited indium tin oxide thin films in different atmospheresAlam, M. J. / Cameron, D. C. et al. | 2002
- 83
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The properties of nanocomposite aluminium-silicon based thin films deposited by filtered arc depositionBendavid, A. / Martin, P. J. / Takikawa, H. et al. | 2002
- 89
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Conducting spinel oxide films with infrared transparencyWindisch Jr, C. F. / Ferris, K. F. / Exarhos, G. J. / Sharma, S. K. et al. | 2002
- 100
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Codoping for the fabrication of p-type ZnOYamamoto, T. et al. | 2002
- 107
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Epitaxial growth of Al-doped ZnO thin films grown by pulsed laser depositionKim, H. / Horwitz, J. S. / Qadri, S. B. / Chrisey, D. B. et al. | 2002
- 112
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Characterization of films and interfaces in n-ZnO/p-Si photodiodesLee, J. Y. / Choi, Y. S. / Choi, W. H. / Yeom, H. W. / Yoon, Y. K. / Kim, J. H. / Im, S. et al. | 2002
- 117
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Spectroscopic ellipsometry study on the structure of Ta2O5/SiOxNy/Si gate dielectric stacksLai, Y. S. / Chen, J. S. et al. | 2002
- 122
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Infrared spectra of carbon nitride filmsRodil, S. E. / Ferrari, A. C. / Robertson, J. / Muhl, S. et al. | 2002
- 132
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Improvement of the adhesion of c-BN films by bias-graded h-BN interlayersFreudenstein, R. / Kulisch, W. et al. | 2002
- 139
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Preparation and properties of BN/AlN nanolaminatesLee, C. H. / Yang, T. S. / Hsu, C. M. / Cheng, C. L. / Wong, M. S. et al. | 2002
- 145
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Growth of carbon nanotubes and nanowires using selected catalystsLiu, R. M. / Ting, J. M. / Huang, J. C. / Liu, C. P. et al. | 2002
- 151
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Fabrication of tubes of diamond with micrometric diameters and their characterizationBaranauskas, V. / Ceragioli, H. J. / Peterlevitz, A. C. et al. | 2002
- 155
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Deposition of polycrystalline diamond films using conventional and time-modulated CVD processesAli, N. / Fan, Q. H. / Ahmed, W. / Gracio, J. et al. | 2002
- 161
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Cathodoluminescence characteristics of polycrystalline diamond films grown by cyclic deposition methodSeo, S. H. / Park, C. K. / Park, J. S. et al. | 2002
- 166
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Growth and characteristics of carbon films with nano-sized metal particlesWu, W. y. / Ting, J. m. et al. | 2002
- 172
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Diamond-like carbon films prepared by facing-target sputteringShi, J. R. / Wang, J. P. et al. | 2002
- 177
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On the properties of nanocomposite amorphous carbon films prepared by off-plane double bend filtered cathodic vacuum arcTay, B. K. / Zhang, P. et al. | 2002
- 185
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Ion-induced electron emission from undoped sub-micron thick diamond filmsMichaelson, S. / Richter, V. / Kalish, R. / Hoffman, A. / Cheifetz, E. / Akhvlediani, R. et al. | 2002
- 190
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Electron injection enhancement by diamond-like carbon film in organic electroluminescence devicesHan, D. W. / Jeong, S. M. / Baik, H. K. / Lee, S. J. / Yang, N. C. / Suh, D. H. et al. | 2002
- 195
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Deposition and evaluation of DLC-Si protective coatings for polycarbonate materialsDamasceno, J. C. / Camargo Jr, S. S. / Cremona, M. et al. | 2002
- 200
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Thermal expansion coefficient of amorphous carbon nitride thin films deposited by glow dischargeChampi, A. / Lacerda, R. G. / Marques, F. C. et al. | 2002
- 205
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Phase and thickness dependence of thermal diffusivity in a-SiCxNy and a-BCxNyChattopadhyay, S. / Chen, L. C. / Chien, S. C. / Lin, S. T. / Wu, C. T. / Chen, K. H. et al. | 2002
- 212
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Effect of bias voltage on the formation of a-C:N nanostructures in ECR plasmasLiu, X. W. / Chan, L. H. / Hong, K. H. / Shih, H. C. et al. | 2002
- 219
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Iron and cobalt silicide catalysts-assisted carbon nanostructures on the patterned Si substratesChang, H. L. / Lin, C. H. / Kuo, C. T. et al. | 2002
- 225
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Growth of the large area horizontally-aligned carbon nanotubes by ECR-CVDHsu, C. M. / Lin, C. H. / Chang, H. L. / Kuo, C. T. et al. | 2002
- 230
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Growth of carbon nanotubes by microwave plasma chemical vapor deposition using CH4 and CO2 gas mixtureChen, M. / Chen, C. M. / Chen, C. F. et al. | 2002
- 235
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XPS and XRR studies on microstructures and interfaces of DLC films deposited by FCVA methodPark, C. K. / Chang, S. M. / Uhm, H. S. / Seo, S. H. / Park, J. S. et al. | 2002
- 241
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Catalysis effect of metal doping on wear properties of diamond-like carbon films deposited by a cathodic-arc activated deposition processChang, Y. Y. / Wang, D. Y. / Wu, W. et al. | 2002
- 248
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Structural and electrical properties of co-sputtered fluorinated amorphous carbon filmJung, H. s. / Park, H. h. et al. | 2002
- 253
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Amorphous carbon layer deposition on plastic film by PSIIWatanabe, S. / Shinohara, M. / Kodama, H. / Tanaka, T. / Yoshida, M. / Takagi, T. et al. | 2002
- 259
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Investigation of the alignment phenomena using a-C:H thin films for liquid crystal alignment materialsRho, S. J. / Lee, D. k. / Baik, H. K. / Hwang, J. y. / Jo, Y. m. / Seo, D. s. et al. | 2002
- 263
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Diamond-like carbon: alteration of the biological acceptance due to Ca-O incorporationDorner-Reisel, A. / Schurer, C. / Nischan, C. / Seidel, O. / Muller, E. et al. | 2002
- 269
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Finite element modelling of stress development during deposition of ion assisted coatingsWard, D. J. / Arnell, R. D. et al. | 2002
- 275
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Fracture mechanisms in nanoscale layered hard thin filmsKarimi, A. / Wang, Y. / Cselle, T. / Morstein, M. et al. | 2002
- 281
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Understanding of automotive clearcoats scratch resistanceBertrand-Lambotte, P. / Loubet, J. L. / Verpy, C. / Pavan, S. et al. | 2002
- 287
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In situ phase evolution study in magnetron sputtered tantalum thin filmsLee, S. L. / Windover, D. / Lu, T. M. / Audino, M. et al. | 2002
- 295
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In situ studies of magnetron sputtered Al-Cu-Fe-Cr quasicrystalline thin filmsWidjaja, E. J. / Marks, L. D. et al. | 2002
- 300
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Acoustic phonon propagation and elastic properties of nano-sized carbon films investigated by Brillouin light scatteringBeghi, M. G. / Casari, C. S. / Li Bassi, A. / Bottani, C. E. / Ferrari, A. C. / Robertson, J. / Milani, P. et al. | 2002
- 306
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Influence of microstructure on oxygen diffusion in plasma-deposited In/Sn filmsQuaas, M. / Steffen, H. / Hippler, R. / Wulff, H. et al. | 2002
- 312
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Electronic properties of Cr1-xAlxN thin films deposited by reactive magnetron sputteringSanjines, R. / Banakh, O. / Rojas, C. / Schmid, P. E. / Levy, F. et al. | 2002
- 324
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Growth and structure of silica films deposited on a polymeric material by plasma-enhanced chemical vapor depositionTeshima, K. / Inoue, Y. / Sugimura, H. / Takai, O. et al. | 2002
- 330
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Localized deformation of multicomponent thin filmsShtansky, D. V. / Kulinich, S. A. / Levashov, E. A. / Sheveiko, A. N. / Kiriuhancev, F. V. / Moore, J. J. et al. | 2002
- 338
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Microstructures and sliding wear resistances of 0.2% carbon steel coatings deposited by HVOF and PTWA thermal spray processesEdrisy, A. / Alpas, A. T. et al. | 2002
- 345
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The technology for analyzing the conditions of rapid thermal annealing by optical second harmonic generationLo, K. y. / Wang, Y. l. / Jin, J. d. et al. | 2002
- 350
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Dark and photoconductivity of amorphous Se-Te-Pb thin filmsSingh Kamboj, M. / Kaur, G. / Thangaraj, R. et al. | 2002
- 354
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The microstructural effect of chemically vapor infiltrated SiC whiskered thin film on the green body of SiC/C compositesLee, Y. J. / Hwang, S. M. / Choi, D. J. / Park, S. H. / Kim, H. D. et al. | 2002
- 360
-
Influence of deposition condition on the microstructure and mechanical properties of Ti-Si-N films by DC reactive magnetron sputteringKim, Soo-Hyun / Kim, Jong-Kuk / Kim, Kwang-Ho et al. | 2002
- 360
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Influence of deposition conditions on the microstructure and mechanical properties of Ti-Si-N films by DC reactive magnetron sputteringKim, S. H. / Kim, J. K. / Kim, K. H. et al. | 2002
- 366
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Comparison of three types of carbon composite coatings with exceptional load-bearing capacity and high wear resistanceZeng, X. T. / Zhang, S. / Ding, X. Z. / Teer, D. G. et al. | 2002
- 371
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Deposition and mechanical properties of Ti-Si-N coated layer on WC-Co by RF inductively coupled plasma-enhanced chemical vapor depositionLee, E. A. / Kim, K. H. et al. | 2002
- 377
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Electrical properties of metal-ferroelectric-insulator-semiconductor using sol-gel derived SrBi2Ta2O9 film and ultra-thin Si3N4 buffer layerHuang, C. H. / Tseng, T. Y. / Chien, C. H. / Yang, M. J. / Leu, C. C. / Chang, T. C. / Liu, P. T. / Huang, T. Y. et al. | 2002
- 382
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Structure of sputtered silicon suboxide single- and multi-layersTomozeiu, N. / van Faassen, E. E. / Arnoldbik, W. M. / Vredenberg, A. M. / Habraken, F. H. et al. | 2002
- 386
-
Structure and mechanical properties of co-deposited TiAl thin filmsHampshire, J. / Kelly, P. J. / Teer, D. G. et al. | 2002
- 392
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Characterization of hot wall epitaxy grown 1-(2-methoxy benzyloxy)-8-hydroxy-9,10-anthraquinone filmsMahajan, A. / Bedi, R. K. / Kumar, S. et al. | 2002
- 398
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Grain growth, agglomeration and interfacial reaction of copper interconnectsYang, C. Y. / Jeng, J. S. / Chen, J. S. et al. | 2002
- 403
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The novel pattern method of low-k hybrid-organic-siloxane-polymer film using X-ray exposureChang, T. C. / Tsai, T. M. / Liu, P. T. / Mor, Y. S. / Chen, C. W. / Mei, Y. J. / Sheu, J. T. / Tseng, T. Y. et al. | 2002
- 408
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Influence of oxygen pressure on the properties and biocompatibility of titanium oxide fabricated by metal plasma ion implantation and depositionLeng, Y. X. / Huang, N. / Yang, P. / Chen, J. Y. / Sun, H. / Wang, J. / Wan, G. J. / Leng, Y. / Chu, P. K. et al. | 2002
- 414
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Structure and properties of WC-CrAlN superlattice films by cathodic arc ion plating processLee, H. Y. / Han, J. G. / Baeg, S. H. / Yang, S. H. et al. | 2002
- 421
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Physical and morphological characterization of reactively magnetron sputtered TiN filmsVaz, F. / Machado, P. / Rebouta, L. / Mendes, J. A. / Lanceros-Mendez, S. / Cunha, L. / Nascimento, S. M. / Goudeau, P. / Riviere, J. P. / Alves, E. et al. | 2002
- 429
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Polycrystalline Si thin film growth on glass using pulsed d.c. magnetron sputteringJung, M. J. / Jung, Y. M. / Shaginyan, L. R. / Han, J. G. et al. | 2002
- 433
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Dependence of working gas pressure and ratio of Ar to O2 on properties of TiO2 films deposited by facing targets sputteringTakahashi, T. / Nakabayashi, H. et al. | 2002
- 438
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Correlation between residual stresses and adhesion of plasma sprayed coatings: effects of a post-annealing treatmentGodoy, C. / Souza, E. A. / Lima, M. M. / Batista, J. C. et al. | 2002
- 446
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Influence of HVOF parameters on the corrosion resistance of NiWCrBSi coatingsGil, L. / Staia, M. H. et al. | 2002
- 455
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Nucleation and growth of Cr clusters and films on (100) SrTiO3 surfacesFu, Q. / Wagner, T. et al. | 2002
- 461
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Ambient pressure dried SiO2 aerogel film on GaAs for application to interlayer dielectricsPark, S. w. / Jung, S. b. / Yang, J. k. / Park, H. h. / Kim, H. c. et al. | 2002
- 465
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Influence of composition and structure on the mechanical properties of BCN coatings deposited by thermal CVDStockel, S. / Weise, K. / Dietrich, D. / Thamm, T. / Braun, M. / Cremer, R. / Neuschutz, D. / Marx, G. et al. | 2002
- 472
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Intellectual property rights in nanotechnologyBastani, B. / Fernandez, D. et al. | 2002
- 478
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Ohmic metallization technology for wide band-gap semiconductorsIliadis, A. A. / Vispute, R. D. / Venkatesan, T. / Jones, K. A. et al. | 2002
- 487
-
Ti-Cr-Al-O thin film resistorsJankowski, A. F. / Hayes, J. P. et al. | 2002
- 492
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Characterization of pentacene organic thin film transistors fabricated on SiNx films by non-photolithographic processesChoo, M. H. / Hong, W. S. / Im, S. et al. | 2002
- 497
-
Growth and properties of titania and aluminum titanate thin films obtained by r.f. magnetron sputteringKuo, D. H. / Tzeng, K. H. et al. | 2002
- 503
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Control of surface residual OH polar bonds in SiO2 aerogel film by silylationJung, S. B. / Park, H. H. et al. | 2002
- 508
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Diamond and hard carbon films for microelectromechanical systems (MEMS)-a nanotribological studyForbes, I. S. / Wilson, J. I. et al. | 2002
- 515
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Micro rapid prototyping system for micro componentsLi, X. / Choi, H. / Yang, Y. et al. | 2002
- 524
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Growth and characteristics of TiNiCu thin filmsHsu, P. Y. / Ting, J. M. et al. | 2002
- 530
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Single- and double-hot arm asymmetrical polysilicon surface micromachined electrothermal microactuators applied to realize a microengineKolesar, E. S. / Ruff, M. D. / Odom, W. E. / Jayachadran, J. A. / McAllister, J. B. / Ko, S. Y. / Howard, J. T. / Allen, P. B. / Wilken, J. M. / Boydston, N. C. et al. | 2002
- 539
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Doped ZnO thin films as anode materials for organic light-emitting diodesKim, H. / Horwitz, J. S. / Kim, W. H. / Makinen, A. J. / Kafafi, Z. H. / Chrisey, D. B. et al. | 2002
- 544
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Structure and dielectrical properties of (Pb,Sr)TiO3 thin films for tunable microwave deviceKim, K. T. / Kim, C. I. et al. | 2002
- 548
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Metal-organic chemical vapor deposition of NbxTa(1-x)NyOmCn films as diffusion barriers for Cu metallizationGau, W. C. / Wu, C. W. / Chang, T. C. / Liu, P. T. / Chu, C. J. / Chen, C. H. / Chen, L. J. et al. | 2002
- 553
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Integrated TiC coatings for moving MEMSRadhakrishnan, G. / Robertson, R. E. / Adams, P. M. / Cole, R. C. et al. | 2002
- 565
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Ion beam induced enhanced adhesion of Au films deposited on polytetrafluoroethyleneGuzman, L. / Man, B. Y. / Miotello, A. / Adami, M. / Ossi, P. M. et al. | 2002
- 571
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Interface control of Gd2O3/GaAs system using pre-deposition of Gd metal on GaAs substrate with native oxidesYang, J. K. / Kang, M. G. / Park, H. H. et al. | 2002
- 575
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Microstructure and electrical properties of Ln2Ti2O7 (Ln=La, Nd)Sik Kim, W. / Ha, S. M. / Yun, S. / Park, H. H. et al. | 2002
- 579
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Study on the low-angle forward-reflected neutral beam etching system for SiO2 etchingChung, M. J. / Lee, D. H. / Yeom, G. Y. et al. | 2002
- 584
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Author Index| 2002
- 586
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Subject Index| 2002
- xvii
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Session chairs| 2002
- xxi
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Exhibitors| 2002
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Executive Committee| 2002
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Symposium Chairs| 2002
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Publication Schedule| 2002
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PrefaceSartwell, B. D. / Rohde, S. / Ensinger, W. / Wahl, K. J. / Marchev, K. et al. | 2002