Spin-on-glass (SOG) process-induced tungsten residue in a semiconductor manufacturing procedure (English)
- New search for: Chen, Ping-Hsun
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- New search for: Chen, Ping-Hsun
- New search for: Chen, Tate
- New search for: Shih, Han-Chang
In:
Microelectronics Journal
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35
, 12
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985-987
;
2004
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ISSN:
- Article (Journal) / Print
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Title:Spin-on-glass (SOG) process-induced tungsten residue in a semiconductor manufacturing procedure
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Contributors:
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Published in:Microelectronics Journal ; 35, 12 ; 985-987
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Publisher:
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Publication date:2004
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Size:3 Seiten, 2 Quellen
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ISSN:
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Coden:
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DOI:
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Type of media:Article (Journal)
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Type of material:Print
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Language:English
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Keywords:
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Source:
Table of contents – Volume 35, Issue 12
The tables of contents are generated automatically and are based on the data records of the individual contributions available in the index of the TIB portal. The display of the Tables of Contents may therefore be incomplete.
- 939
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An area-efficient static CMOS carry-select adder based on a compact carry look-ahead unitRuiz, G.A. / Granda, M. et al. | 2004
- 945
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Approach to partially self-checking combinational circuits designDjordjevic, Goran Lj / Stojcev, Mile K. / Stankovic, Tatjana R. et al. | 2004
- 953
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Designing CMOS data cells for space systemsRockett, Leonard R. et al. | 2004
- 969
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Fabrication of strained Si channel PMOSFET on thin relaxed Si1−xGex virtual substrateMei, Ding-Lei / Li, Jing-chun / Zhang, Jing / Xu, Wan-jing / Tan, Kai-zhou / Yang, Mo-hua et al. | 2004
- 969
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Fabrication of strained Si channel PMOSFET on thin relaxed Si1#x0221;xGex virtual substrateMei, Ding-Lei et al. | 2004
- 973
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Optimization of sub-0.1-μm offset Γ-shaped gate MHEMTs for millimeter-wave applicationsHan, Min / Son, Myung-Sik / Oh, Jung-Hun / Lee, Bok-Hyung / Kim, Mi-Ra / Kim, Sam-Dong / Rhee, Jin-Koo et al. | 2004
- 973
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Optimization of sub-0.1-mm offset G-shaped gate MHEMTs for millimeter-wave applicationsHan, M. / Son, M. S. / Oh, J. H. / Lee, B. H. / Kim, M. R. / Kim, S. D. / Rhee, J. K. et al. | 2004
- 973
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Optimization of sub-0.1-#x003B;m offset #x0039;-shaped gate MHEMTs for millimeter-wave applicationsHan, Min et al. | 2004
- 985
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Spin-on-glass (SOG) process-induced tungsten residue in a semiconductor manufacturing procedureChen, Ping Hsun / Chen, Tate / Shih, Han Chang et al. | 2004
- 989
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Design of a single-electron current source for nanoelectronic devicesGonc<math><rm><a><ac> </ac><ac>̧</ac></a></rm></math>alves Guimarães, Janaina / da Costa, José Camargo et al. | 2004
- CO2
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Editorial board| 2004
- III
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Contents of Vol. 35| 2004
- XIII
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Author index| 2004