Surface morphology anisotropy and stress distribution uniformity in annealed Cu-W films (English)
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In:
Journal of Materials Research
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20
, 1
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151-160
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2005
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ISSN:
- Article (Journal) / Print
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Title:Surface morphology anisotropy and stress distribution uniformity in annealed Cu-W films
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Additional title:Anisotropie der Oberflächenmorphologie und Gleichmäßigkeit der Spannungsverteilung in getemperten dünnen Cu-W-Schichten
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Contributors:Wang, Y. ( author ) / Li, X.H. ( author ) / Chen, Y.H. ( author ) / Xu, K.W. ( author ) / Fan, D.W. ( author )
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Published in:Journal of Materials Research ; 20, 1 ; 151-160
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Publisher:
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Publication date:2005
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Size:10 Seiten, 7 Bilder, 1 Tabelle, 29 Quellen
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ISSN:
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Coden:
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DOI:
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Type of media:Article (Journal)
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Type of material:Print
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Language:English
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Keywords:Substrat , keramisches Substrat , Metallsubstrat , Kupferlegierung , Wolfram , Wolframverbindung , Wolframlegierung , Magnetronzerstäubung , Oberflächenbeschaffenheit , Spannungsverteilung , mechanische Spannungsverteilung , Dünnschicht , Temperatureinfluss , Eigenspannung , Glühen , Anlassen (Wärmebehandlung) , mineralogische Zusammensetzung , Mikrostruktur , Werkstoffgefüge , metallische Dünnschicht , Metallfilm , Anisotropie , anisotropes Material
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Source:
Table of contents – Volume 20, Issue 1
The tables of contents are generated automatically and are based on the data records of the individual contributions available in the index of the TIB portal. The display of the Tables of Contents may therefore be incomplete.
- 1
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(Fe,Co,Ni)–B–Si–Nb bulk glassy alloy with super-high strength and some ductilityShen, Baolong / Inoue, Akihisa et al. | 2005
- 1
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RAPID COMMUNICATIONS - (Fe,Co,Ni)-B-Si-Nb bulk glassy alloy with super-high strength and some ductilityShen, Baolong et al. | 2005
- 6
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Epitaxial growth of solution-based rare-earth niobate, $ RE_{3} $$ NbO_{7} $, films on biaxially textured Ni–W substratesParanthaman, M. / Bhuiyan, M. S. / Sathyamurthy, S. / Zhai, H. Y. / Goyal, A. / Salama, K. et al. | 2005
- 6
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RAPID COMMUNICATIONS - Epitaxial growth of solution-based rare-earth niobate, RE3NbO7, films on blaxially textured Ni-W substratesParanthaman, M. et al. | 2005
- 10
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Technique to make nano carbon tubes buried inside rubber composite visible using femtosecond pulse laser ablationSaito, Yasunori / Kobayashi, Fumitoshi / Takeda, Toshikazu / Takeuchi, Akiko / Nomura, Akio / Endo, Morinobu et al. | 2005
- 10
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RAPID COMMUNICATIONS - Technique to make nano carbon tubes buried inside rubber composite visible using femtosecond pulse laser ablationSaito, Yasunori et al. | 2005
- 13
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Comparison of the high-temperature deformation of alumina-zirconia and alumina-zirconia-mullite compositesChen, Tiandan / Mecartney, Martha L. et al. | 2005
- 13
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RAPID COMMUNICATIONS - Comparison of the high-temperature deformation of alumina-zirconia and alumina-zirconia-mullite compositesChen, Tiandan et al. | 2005
- 13
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Comparions of the high-temperature deformation of alumina-zirconia and alumina-zirconia-mullite compositesChen, Tiandan / Mecartney, Martha L. et al. | 2005
- 18
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High-temperature dielectric properties of goethite from 400 to 3000 MHzPickles, C. A. / Mouris, J. / Hutcheon, R. M. et al. | 2005
- 30
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Lattice thermal vibration and its nonharmonic effect in Nd-doped rare-earth vanadatesXia, H.R. et al. | 2005
- 36
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Study on electronic structure and magnetic properties of $ Ni_{3} $Fe ferromagnetic layer adjacent to CuBi, Xiaofang / Yuan, Xiaoyu / Gong, Shengkai / Xu, Huibin et al. | 2005
- 42
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A novel structural mesoporous alumina/yttrium doped zirconia nanocrystalline derived by solvothermal approachChen, Hangrong / Wang, Xin Michael / Shia, Jianlin / Xiao, Ping / Yan, Dongsheng et al. | 2005
- 42
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A novel structural mesoporous alumina-yttrium doped zirconia nanocrystalline composite derived by solvothermal approachChen, Hangrong et al. | 2005
- 48
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Determination of the trap state density differences in hydrogenated amorphous silicon-germanium alloysBoshta, M. et al. | 2005
- 54
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Hollow mesoporous spheres with cubic pore network as a potential carrier for drug storage and its in vitro release kineticsZhu, Yu-fang / Shi, Jian-lin / Li, Yong-sheng / Chen, Hang-rong / Shen, Wei-hua / Dong, Xiao-ping et al. | 2005
- 62
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Laser-induced growth of titanium nitride microcolumns on biased titanium targetsGyörgy, E. / Pérez del Pino, A. / Serra, P. / Morenza, J. L. et al. | 2005
- 68
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Influence of the microstructure on the optical characteristics of SrTiO3 thin filmsGaidi, M. et al. | 2005
- 75
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Microstructural evolution of nanocrystalline magnetite synthesized by electrocoagulationWeng, Ying-Chieh / Rusakova, I. A. / Baikalov, Andrei / Chen, J. W. / Wu, Nae-Lih et al. | 2005
- 81
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Influence of electrode modification by Ar+ ion beam upon passivation and electrical characteristics in organic light-emitting diodesJeong, Soon Moon et al. | 2005
- 93
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Fine-grain processing by equal channel angular extrusion of rapidly quenched bulk Mg-Y-Zn alloy93-101Watanabe, Hiroyuki et al. | 2005
- 93
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Fine-grain processing by equal channel angular extrusion of rapidly quenched bulk Mg–Y–Zn alloyWatanabe, Hiroyuki / Somekawa, Hidetoshi / Higashi, Kenji et al. | 2005
- 102
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Aerosol synthesis of pure and Pt-doped ZnO particles using nitrate and pdda-Pt(IV) complex solutionsDjinovic, Vesna M. et al. | 2005
- 114
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Meso-porous alumina capillary tube as a support for high-temperature gas separation membranes by novel pulse sequential anodic oxidation techniqueInada, Takeshi / Uno, Naoki / Kato, Takeharu / Iwamoto, Yuji et al. | 2005
- 121
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Photoelectrochemical and photocatalytic properties of multilayered $ TiO_{2} $ thin films with a spinodal phase separation structure prepared by a sol-gel processMori, Ryohei / Yoko, Toshinobu / Takahashi, Masahide et al. | 2005
- 128
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Alternative chemical route to mesoporous titania from a titanatrane complexTrakanprapai, Chavalit et al. | 2005
- 135
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Anisotropic yield behavior of lotus-type porous iron: Measurements and micromechanical mean-field analysisTane, M. / Ichitsubo, T. / Hyun, S. K. / Nakajima, H. et al. | 2005
- 144
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Enthalpy of formation of yttria-doped ceriaChen, Weiqun / Lee, Theresa A. / Navrotsky, Alexandra et al. | 2005
- 151
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Surface morphology anisotropy and stress distribution uniformity in annealed Cu–W filmsWang, Y. / Li, X.-H / Chen, Y.-H / Xu, K.-W / Fan, D. W. et al. | 2005
- 161
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Stresses during micromolding of metals at elevated temperatures: pilot experiments and a simple modelMeng, W. J. / Cao, D. M. / Sinclair, G. B. et al. | 2005
- 176
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Microstructure and chemistry of annealed Al-Cu-Fe-Cr quasicrystalline approximant coatingsDaniels, M.J. et al. | 2005
- 183
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Fabrication of Al2O3-BN nanocomposites by chemical processing and their mechanical propertiesKusunose, Takafumi et al. | 2005
- 191
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Enthalpies of formation of $ LaMO_{3} $ perovskites (M = Cr, Fe, Co, and Ni)Cheng, Jihong / Navrotsky, Alexandra / Zhou, Xiao-Dong / Anderson, Harlan U. et al. | 2005
- 191
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Enthalpies of formation of LaMO3 perovskites (MCheng, Jihong et al. | 2005
- 201
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Damage behavior of 200-nm thin copper films under cyclic loadingZhang, G. P. / Volkert, C. A. / Schwaiger, R. / Arzt, E. / Kraft, O. et al. | 2005
- 208
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Effect of Fe segregation on the migration of a non-symmetric Sigma 5 tilt grain boundary in AlMendelev, M.I. / Srolovitz, D.J. / Ackland, G.J. / Han, S.E. et al. | 2005
- 208
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Effect of Fe segregation on the migration of a non-symmetric S5 tilt grain boundary in AlMendelev, M.I. et al. | 2005
- 208
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Effect of Fe segregation on the migration of a non-symmetric ∑5 tilt grain boundary in AlMendelev, M. I. / Srolovitz, D. J. / Ackland, G. J. / Han, S. et al. | 2005
- 208
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Effect of Fe segregation on the migration of a non-symmetric Sigma5 tilt grain boundary in AIMendelev, M. I. / Srolovitz, D. J. / Ackland, G. J. / Han, S. et al. | 2005
- 219
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Interfacial bonding behavior with introduction of Sn–Zn–Bi paste to Sn–Ag–Cu ball grid array package during multiple reflowsShih, Po-Cheng / Lin, Kwang-Lung et al. | 2005
- 230
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The effect of electrolyte composition on the fabrication of self-organized titanium oxide nanotube arrays by anodic oxidationCai, Qingyun et al. | 2005
- 237
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Stability of Fe-based alloys with structure type $ C_{6} $$ Cr_{23} $Widom, M. / Mihalkovic, M. et al. | 2005
- 243
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Orientation control of lead zirconate titanate film by combination of sol-gel and sputtering depositionPark, Chee-Sung / Kim, Sang-Wook / Park, Gun-Tae / Choi, Jong-Jin / Kim, Hyoun-Ee et al. | 2005
- 247
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Properties of indium molybdenum oxide films fabricated via high-density plasma evaporation at room temperatureSun, Shi-Yao et al. | 2005
- 247
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Properties of indium molybdenum oxide films fabricated via high-density plasma evoporation at room temperatureSun, Shi-Yao / Huang, Jow-Lay / Lii, Ding-Fwu et al. | 2005
- 256
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Characterization of anatase nanocrystal-precipitated coatings from (100 - x)SiO2.xTiO2 gel films via the sol-gel process with boiling hot water treatmentMatsuda, Atsunori et al. | 2005
- 264
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Refractive index and low dispersion properties of new fluorophosphate glasses highly doped with rare-earth ionsChoi, J. H. / Shi, F. G. / Margaryan, A. et al. | 2005