Reactive ion etching of Ge2Sb2Te5 in CHF3/O2 plasma for nonvolatile phase-change memory device (English)
- New search for: Feng, Gaoming
- New search for: Liu, Bo
- New search for: Song, Zhitang
- New search for: Feng, Songlin
- New search for: Chen, Bomy
- New search for: Feng, Gaoming
- New search for: Liu, Bo
- New search for: Song, Zhitang
- New search for: Feng, Songlin
- New search for: Chen, Bomy
In:
Electrochemical and Solid-State Letters
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10
, 5
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D47-50
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2007
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ISSN:
- Article (Journal) / Print
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Title:Reactive ion etching of Ge2Sb2Te5 in CHF3/O2 plasma for nonvolatile phase-change memory device
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Contributors:Feng, Gaoming ( author ) / Liu, Bo ( author ) / Song, Zhitang ( author ) / Feng, Songlin ( author ) / Chen, Bomy ( author )
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Published in:Electrochemical and Solid-State Letters ; 10, 5 ; D47-50
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Publisher:
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Publication date:2007
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Size:4 Seiten, 15 Quellen
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ISSN:
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Coden:
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DOI:
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Type of media:Article (Journal)
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Type of material:Print
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Language:English
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Keywords:
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Source:
Table of contents – Volume 10, Issue 5
The tables of contents are generated automatically and are based on the data records of the individual contributions available in the index of the TIB portal. The display of the Tables of Contents may therefore be incomplete.
- A127
-
Nanocrystalline Rutile TiO~2 Electrode for High-Capacity and High-Rate Lithium StorageJiang, C. et al. | 2007
- A130
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A Lithium-Ion Cell Based on Li~4~/~3Ti~5~/~3O~4 and LiVPO~4FBarker, J. et al. | 2007
- A134
-
Size-Dependent Lithium Miscibility Gap in Nanoscale Li~1~-~xFePO~4Meethong, N. et al. | 2007
- B81
-
Measurement of Oxygen Exchange Kinetics on Thin-Film La~0~.~6Sr~0~.~4CoO~3~-~d~e~l~t~a - Using Nonlinear Electrochemical Impedance SpectroscopyWilson, J. R. et al. | 2007
- B87
-
The Effect of Sn Addition on a Pt/C Electrocatalyst Synthesized by Borohydride Reduction and Hydrothermal Treatment for a Low-Temperature Fuel CellLim, D.-H. et al. | 2007
- B91
-
Mitigation of Highly Resistive Grain-Boundary Phase in Gadolinia-Doped Ceria by the Addition of SrOKim, D. K. et al. | 2007
- B96
-
Mediated Enzyme Electrodes with Combined Micro- and Nanoscale SupportsBarton, S. C. et al. | 2007
- B101
-
PEM Fuel Cell Pt/C Dissolution and Deposition in Nafion ElectrolyteBi, W. et al. | 2007
- C35
-
Inhibition of Filiform Corrosion on AA6111-T4 Using In-Coating Phenylphosphonic AcidColeman, A. J. et al. | 2007
- C39
-
Pitting of Al-Based Amorphous-Nanocrystalline Alloys with Solute-Lean NanocrystalsLucente, A. M. et al. | 2007
- C44
-
Fabrication of Freestanding Metallic Micro Hollow Tubes by Template-Free Localized Electrochemical DepositionSeol, S. K. et al. | 2007
- D43
-
Selectivity Enhancement of Electroless Co Deposition for Cu Capping Process via Spontaneous Diazonium Ion ReductionChang, S. Y. et al. | 2007
- D47
-
Reactive Ion Etching of Ge~2Sb~2Te~5 in CHF~3/O~2 Plasma for Nonvolatile Phase-Change Memory DeviceFeng, G. et al. | 2007
- D51
-
Electroenhanced Metallorganic Chemical Vapor Deposition of Copper FilmsKuo, Y.-L. et al. | 2007
- E7
-
Variation of Mechanical Properties of TiO~2 during Li InsertionLindstrom, H. et al. | 2007
- F13
-
Double-Walled Carbon Nanotube Electrodes for Electrochemical SensingPunbusayakul, N. et al. | 2007
- F18
-
Electrochemical Reduction of Oxygen on Multiwalled Carbon Nanotube Modified Glassy Carbon Electrodes in Acid MediaAlexeyeva, N. et al. | 2007
- G25
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Properties of Pt/SrBi~2Ta~2O~9/BL/Si MFIS Structures Containing HfO~2, SiO~2, and Si~3N~4 Buffer LayersLeu, C.-C. et al. | 2007
- G29
-
Strain Effects on the Ferromagnetic and Electronic Properties in (La~0~.~9~1,Sr~0~.~0~9)MnO~3 Thin FilmsChen, Y.-H. et al. | 2007
- H135
-
High-Performance, Spin-Coated Zinc Tin Oxide Thin-Film TransistorsChang, Y.-J. et al. | 2007
- H139
-
Reduction of Dry Etch Damage to GaAs Using Pulse-Time Modulated PlasmasKhanna, R. et al. | 2007
- H142
-
A Fabrication Method for Reduction of Silicide Contamination in Polycrystalline-Silicon Thin-Film TransistorsSong, N.-K. et al. | 2007
- H145
-
Surface Activation Using Remote Plasma for Hydrophilic Bonding at Elevated TemperatureBelford, R. E. et al. | 2007
- H149
-
Atomic Layer Deposition of Hafnium Silicate from HfCl~4, SiCl~4, and H~2OFedorenko, Y. et al. | 2007
- H153
-
Electrochemical Formation of Size-Controlled InP Nanostructures Using Anodic and Cathodic ReactionsSato, T. et al. | 2007
- H156
-
Enhancement of Hole Injection in Organic TFTs by Ozone Treatment of Indium Tin Oxide ElectrodesCho, J. H. et al. | 2007
- J55
-
Improvement of Current Injection and Efficiency of Polymer Light-Emitting Diodes with the Octadecyltrichlorosilane-Treated PEDOT:PSSLee, Y. K. et al. | 2007
- J58
-
Nonenzymatic Glucose Sensor Using Freestanding Single-Wall Carbon Nanotube FilmsWang, J. et al. | 2007
- J61
-
Crystallization of Amorphous Silicon Thin Films Using Self-Limiting ALD of Nickel OxideSo, B.-S. et al. | 2007
- J65
-
Thermal Annealing Effect on Amorphous Silicon Thin-Film Transistors Fabricated on a Flexible Stainless Steel SubstrateHan, C.-W. et al. | 2007
- J68
-
Solvent Effect of the Passivation Layer on Performance of an Organic Thin-Film TransistorHan, S. H. et al. | 2007