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Micromachining, due to the miniaturization of the tools, is subject to a large variety of specific influencing factors. These factors essentially affect accuracy and surface quality of microstructured moulds and prototypes. Especially the machining of high strength materials is so far not sufficiently controllable to guarantee reliability and repeatability for complex microstructured parts. The influence of these factors can be improved by an aligned process control. Particularly the choice of milling strategies and the associated process parameters is essential. Within the paper different milling strategies, depending on the machined geometry, will be discussed. Results obtained within these investigations offer potentials regarding the reliable micromilling of hard to machine materials. Substantial results with reference to geometry-depending milling strategies could be achieved, both for the 2.5D and 3D machining. The different machining strategies revealed large differences regarding achieved accuracy, but the results also offer how each strategy affected surface quality. The suitable machining strategy has to consider accuracy as well as surface quality aspects. In general not a single machining strategy can be applied to machine complex shaped micro structured parts, a combined strategy is necessary. It is shown, that the engagement parameters are influencing the machining results in a remarkable manner. Investigations in 5-axis micromachining are necessary to show the possibilities and limitations of this technology in micromilling. Reasons for surface and accuracy failures are shown and strategies to avoid them are exemplified.