Effect of nitrogen doping on piezoresistive properties of a-Si(x)C(y) thin film strain gauges (English)
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In:
Microsystem Technologies
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16
, 6
;
925-930
;
2010
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ISSN:
- Article (Journal) / Print
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Title:Effect of nitrogen doping on piezoresistive properties of a-Si(x)C(y) thin film strain gauges
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Additional title:Einfluss der Stickstoffdotierung auf die piezoresistiven Eigenschaften von a-Si(x)C(y)-Dünnschicht-Dehnungssensoren
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Contributors:
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Published in:Microsystem Technologies ; 16, 6 ; 925-930
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Publisher:
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Publication date:2010
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Size:6 Seiten, 8 Bilder, 2 Tabellen, 8 Quellen
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ISSN:
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Coden:
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DOI:
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Type of media:Article (Journal)
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Type of material:Print
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Language:English
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Keywords:
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Source:
Table of contents – Volume 16, Issue 6
The tables of contents are generated automatically and are based on the data records of the individual contributions available in the index of the TIB portal. The display of the Tables of Contents may therefore be incomplete.
- 909
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Analytical method of predicating the instabilities of a micro arch-shaped beam under electrostatic loadingZhang, Yin / Wang, Yisong / Li, Zhihong et al. | 2010
- 919
-
A low voltage vertical comb RF MEMS switchAghaei, Samira / Abbaspour-Sani, Ebrahim et al. | 2010
- 925
-
Effect of nitrogen doping on piezoresistive properties of a-Si x C y thin film strain gaugesFraga, M. A. / Furlan, H. / Massi, M. / Oliveira, I. C. et al. | 2010
- 931
-
A miniature in-plane piezoresistive MEMS accelerometer for detection of slider off-track motion in hard disk drivesYuan, Yanhui / Du, Hejun / Wang, Shao et al. | 2010
- 941
-
Fabrication of the plastic component for photonic crystal using micro injection moldingChang, Ching-Ho / Young, Wen-Bin et al. | 2010
- 947
-
Modeling of micro/nano particle separation in microchannels with field-flow fractionationSong, Minghao / Sun, Hongwei / Charmchi, Majid / Wang, Pengtao / Zhang, Zongqin / Faghri, Mohammad et al. | 2010
- 955
-
Single-walled carbon nanotube network/poly composite thin film for flow sensorCao, Hui / Gan, Zhiyin / Lv, Qiang / Yan, Han / Luo, Xiaobin / Song, Xiaohui / Liu, Sheng et al. | 2010
- 961
-
Non-resonant electromagnetic wideband energy harvesting mechanism for low frequency vibrationsYang, Bin / Lee, Chengkuo et al. | 2010
- 967
-
MEMS_DSC: a new device for microcalorimetric analysis in the biological fieldMaggiolino, S. / Scuor, N. / Mahajan, R. L. / Sbaizero, O. et al. | 2010
- 973
-
Axial and shear fracture strength evaluation of silicon microneedlesKhanna, Puneet / Luongo, Kevin / Strom, Joel A. / Bhansali, Shekhar et al. | 2010
- 979
-
Dynamic characterization and modification of dynamic properties of a micro scannerVeryeri, Ilgar / Basdogan, Ipek et al. | 2010
- 993
-
Dynamic actuation and sensing micro-device for mechanical response of cultured adhesive cellsKonno, Ken-ichi / Kosawada, Tadashi / Suzuki, Masato / Nakamura, Takeshi / Feng, Zhonggang / Hozumi, Yasukazu / Goto, Kaoru et al. | 2010
- 1001
-
Fabrication of a surface stress-based PDMS micro-membrane biosensorSang, Shengbo / Witte, Hartmut et al. | 2010
- 1009
-
Effect of physical vapor deposition metallic thin films on micro injection molded weld line mechanical propertiesXie, Lei / Leester-Schädel, Monika / Ziegmann, Gerhard / Büttgenbach, Stephanus et al. | 2010
- 1015
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Monolithic micro-fabrication of Si micro-electro-mechanical structure with GaN light emitting diodeIto, R. / Wakui, M. / Sameshima, H. / Hu, F.-R. / Hane, K. et al. | 2010
- 1021
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Optimization of thermal fly-height control slider geometry for Tbit/in2 recordingVakis, Antonis I. / Polycarpou, Andreas A. et al. | 2010