Design, fabrication and characterization of a front-etched micromachined thermopile for IR detection (English)
- New search for: Xu, Dehui
- New search for: Xiong, Bin
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- New search for: Xu, Dehui
- New search for: Xiong, Bin
- New search for: Wang, Yuelin
In:
Journal of Micromechanics and Microengineering
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20
, 11
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115004/1-115004/10
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2010
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ISSN:
- Article (Journal) / Print
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Title:Design, fabrication and characterization of a front-etched micromachined thermopile for IR detection
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Contributors:
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Published in:Journal of Micromechanics and Microengineering ; 20, 11 ; 115004/1-115004/10
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Publisher:
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Publication date:2010
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Size:10 Seiten, 10 Bilder, 3 Tabellen, 20 Quellen
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ISSN:
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DOI:
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Type of media:Article (Journal)
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Type of material:Print
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Language:English
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Keywords:
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Source:
Table of contents – Volume 20, Issue 11
The tables of contents are generated automatically and are based on the data records of the individual contributions available in the index of the TIB portal. The display of the Tables of Contents may therefore be incomplete.
- 112001
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Electrothermal bistability tuning in a large displacement micro actuatorY Gerson / S Krylov / B Ilic et al. | 2010
- 112001
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BRIEF COMMUNICATION: Electrothermal bistability tuning in a large displacement micro actuatorGerson, Y et al. | 2010
- 115001
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Mechanically coupled synchronized resonators for resonant sensing applicationsJinyang Feng / Xiongying Ye / Masayoshi Esashi / Takahito Ono et al. | 2010
- 115002
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Fabrication, assembly and heat transfer testing of low-profile copper-based microchannel heat exchangersBin Lu / Ke Chen / W J Meng / Fanghua Mei et al. | 2010
- 115003
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Self-assembly and sensing-group graft of pre-modified CNTs on resonant micro-cantilevers for specific detection of volatile organic compound vaporsPengcheng Xu / Xinxin Li / Haitao Yu / Min Liu / Jungang Li et al. | 2010
- 115004
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Design, fabrication and characterization of a front-etched micromachined thermopile for IR detectionDehui Xu / Bin Xiong / Yuelin Wang et al. | 2010
- 115005
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Experimental analysis of waveform effects on satellite and ligament behavior via in situ measurement of the drop-on-demand drop formation curve and the instantaneous jetting speed curveKye-Si Kwon et al. | 2010
- 115006
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Argon plasma-assisted PDMS–LTCC bonding technique for microsystem applicationsKarol Malecha / Irena Gancarz / Włodzimierz Tylus et al. | 2010
- 115007
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3C-SiC films on insulated substrates for high-temperature electrostatic-based resonatorsMarcel Placidi / Amador Pérez-Tomás / Marcin Zielinski / Philippe Godignon / José Millán / Xavier Jordà / Narcis Mestres / Gabriel Abadal et al. | 2010
- 115008
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Optimized piranha etching process for SU8-based MEMS and MOEMS constructionMatthew Holmes / Jared Keeley / Katherine Hurd / Holger Schmidt / Aaron Hawkins et al. | 2010
- 115009
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Single wafer fabrication of a symmetric double-sided beam–mass structure using DRIE and wet etching by a novel vertical sidewall protection techniqueXiaofeng Zhou / Lufeng Che / Bin Xiong / Kebin Fan / Yuelin Wang / Zuankai Wang et al. | 2010
- 115010
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Study on the mechanical behavior of laser micro-adjustment of two-bridge actuatorsHong Shen / Linfa Peng / Jun Hu / Zhenqiang Yao et al. | 2010
- 115011
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A modular assembly method of a feed and thruster system for CubesatsMarcus Louwerse / Henri Jansen / Miko Elwenspoek et al. | 2010
- 115012
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Replica molding for multilevel micro-/nanostructure replicationT Senn / J P Esquivel / M Lörgen / N Sabaté / B Löchel et al. | 2010
- 115013
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Micromilling of thin ribs with high aspect ratiosP Li / D Zdebski / H H Langen / A M Hoogstrate / J A J Oosterling / R H Munnig Schmidt / D M Allen et al. | 2010
- 115014
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Self-assembly and transfer of photoresist suspended over trenches for microbeam fabrication in MEMSZi Yang Wu / Heng Yang / Xin Xin Li / Yue Lin Wang et al. | 2010
- 115015
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Analytical and experimental study on the second harmonic mode response of a bulk acoustic wave resonatorWei Pang / Hao Zhang / Richard C Ruby / Hongyu Yu / Eun Sok Kim et al. | 2010
- 115016
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Atomic force microscope probe-based nanometric scribingM Malekian / S S Park / D Strathearn / Md G Mostofa / M B G Jun et al. | 2010
- 115017
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Polymeric microbead arrays for microfluidic applicationsJason A Thompson / Xiaoguang Du / Joseph M Grogan / Michael G Schrlau / Haim H Bau et al. | 2010
- 115018
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Modelling and testing of a piezoelectric ultrasonic micro-motor suitable for in vivo micro-robotic applicationsB Watson / J Friend / L Yeo et al. | 2010
- 115019
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Dynamic analytical modelling and piezoelectric characterization of a Pb(Zr, Ti)O3/SiN cantilever with lossesG Arndt / E Defay / G Le Rhun / P Rey / F Perruchot / M Aid / L Liu / M Miller et al. | 2010
- 115020
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Microfluidic proportional flow controllerHarrison Prentice-Mott / Mehmet Toner / Daniel Irimia et al. | 2010
- 115021
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A smart fully integrated micromachined separator with soft magnetic micro-pillar arrays for cell isolationTao Dong / Qianhua Su / Zhaochu Yang / Yulong Zhang / Eirik B Egeland / Dan D Gu / Paolo Calabrese / Matteo J Kapiris / Frank Karlsen / Nhut T Minh et al. | 2010
- 115022
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Self-comparison measurement for slippage on superhydrophobic surfaces based on the wetting transitionJian Li / Ming Zhou / Xia Ye / Lan Cai et al. | 2010
- 115023
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Copper electrodeposition in a through-silicon via evaluated by rotating disc electrode techniquesTzu-Hsuan Tsai / Jui-Hsiung Huang et al. | 2010
- 115024
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A study on utilizing a chloride bath to electroform MEMS devices with high aspect ratio structuresHong Wang / Jun Tang / Guangyang Li / Congchun Zhang / Jun Zhu / Zhimin Wang / GuiFu Ding / Xiaolin Zhao et al. | 2010
- 115025
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Single mode dye-doped polymer photonic crystal lasersMads B Christiansen / Thomas Buß / Cameron L C Smith / Sidsel R Petersen / Mette M Jørgensen / Anders Kristensen et al. | 2010
- 115026
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A novel micro transportation system with fast movement of a micro container based on electrostatic actuation and a ratchet mechanismDzung Viet Dao / Phuc Hong Pham / Susumu Sugiyama et al. | 2010
- 115027
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Surface charge extraction methods in offset shift-related failures of MEMS pressure sensorsWoo-Tae Park / Bernhard Grote / Chad Dawson / Lianjun Liu et al. | 2010
- 115028
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A high-speed MEMS grating laser scanner with a backside thinned grating platform fabricated using a single mask delay etching techniqueYu Du / Guangya Zhou / Kelvin Koon Lin Cheo / Qingxin Zhang / Hanhua Feng / Fook Siong Chau et al. | 2010
- 115029
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Characterization of nanomechanical graphene drum structuresC-L Wong / M Annamalai / Z-Q Wang / M Palaniapan et al. | 2010
- 115030
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Micromachining on copper and nickel by electrochemical wet stampingJing Tang / Li Zhang / Xiaochun Tian et al. | 2010
- 115031
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Fabrication of a SU-8-based polymer-enclosed channel with a penetrating UV/ozone-modified interior surface for electrokinetic separation of proteinsChia-Jung Chang / Chung-Shi Yang / Li-Hua Lan / Pen-Cheng Wang / Fan-Gang Tseng et al. | 2010
- 115032
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Bonding strength of pressurized microchannels fabricated by polydimethylsiloxane and siliconGuan-Wei Wu / Wen-Pin Shih / Chung-Yuen Hui / Sih-Li Chen / Chi-Yuan Lee et al. | 2010
- 115033
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On gas permeation in PDMSLung-Jieh Yang et al. | 2010
- 115034
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Experimental study of a variable-capacitance micromotor with electrostatic suspensionF T Han / Q P Wu / L Wang et al. | 2010
- 115035
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Tunable microlens arrays actuated by various thermo-responsive hydrogel structuresXuefeng Zeng / Chenhui Li / Difeng Zhu / Hyung Joon Cho / Hongrui Jiang et al. | 2010
- 115036
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Differential internal dielectric transduction of a Lamé-mode resonatorM Ziaei-Moayyed / D Elata / E P Quévy / R T Howe et al. | 2010
- 115036
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Differential internal dielectric transduction of a Lame-mode resonatorZiaei-Moayyed, M. / Elata, D. / Quevy, E.P. / Howe, R.T. et al. | 2010
- 115037
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Deep UV patterning of acrylic masters for molding biomimetic dry adhesivesD Sameoto / C Menon et al. | 2010
- 115038
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Optical interferometric displacement calibration and thermomechanical noise detection in bulk focused ion beam-fabricated nanoelectromechanical systemsW K Hiebert / D Vick / V Sauer / M R Freeman et al. | 2010
- 117001
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The effects of adhesion energy on the fabrication of high-aspect-ratio SU-8 microstructuresKyu-Youn Hwang / Chin-Sung Park / Joon-Ho Kim / Kahp-Yang Suh / Eun-Chul Cho / Nam Huh et al. | 2010
- 117001
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TECHNICAL NOTE: The effects of adhesion energy on the fabrication of high-aspect-ratio SU-8 microstructuresHwang, Kyu-Youn et al. | 2010