Computer-controlled dynamic mode multidirectional UV lithography for 3D microfabrication (English)
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In:
Journal of Micromechanics and Microengineering
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21
, 3
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035003/1-035003/14
;
2011
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ISSN:
- Article (Journal) / Print
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Title:Computer-controlled dynamic mode multidirectional UV lithography for 3D microfabrication
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Contributors:
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Published in:Journal of Micromechanics and Microengineering ; 21, 3 ; 035003/1-035003/14
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Publisher:
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Publication date:2011
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Size:14 Seiten, 16 Bilder, 2 Tabellen, 39 Quellen
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ISSN:
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DOI:
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Type of media:Article (Journal)
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Type of material:Print
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Language:English
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Keywords:
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Source:
Table of contents – Volume 21, Issue 3
The tables of contents are generated automatically and are based on the data records of the individual contributions available in the index of the TIB portal. The display of the Tables of Contents may therefore be incomplete.
- 035001
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Electrokinetic and optical control of bacterial microrobotsEdward B Steager / Mahmut Selman Sakar / Dal Hyung Kim / Vijay Kumar / George J Pappas / Min Jun Kim et al. | 2011
- 035002
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Fabrication and characterization of a microporous polymeric micro-filter for isolation of Cryptosporidium parvum oocystsMajid Ebrahimi Warkiani / Chao-Ping Lou / Hai-Qing Gong et al. | 2011
- 035003
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Computer-controlled dynamic mode multidirectional UV lithography for 3D microfabricationJungkwun Kim / Mark G Allen / Yong-Kyu Yoon et al. | 2011
- 035004
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A flexible tri-axis contact force sensor for tubular medical device applicationsMiao Lu / Jijun Xiong / Tianhong Cui et al. | 2011
- 035005
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A new process for CMOS MEMS capacitive sensors with high sensitivity and thermal stabilityS S Tan / C Y Liu / L K Yeh / Y H Chiu / Klaus Y J Hsu et al. | 2011
- 035006
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Roll-to-roll fabricated lab-on-a-chip devicesAsger Laurberg Vig / Tapio Mäkelä / Päivi Majander / Vito Lambertini / Jouni Ahopelto / Andrs Kristensen et al. | 2011
- 035007
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Out-of-plane high-density piezoresistive silicon microwire/p–n diode array for force- and temperature-sensitive artificial whisker sensorsAkihito Ikedo / Makoto Ishida / Takeshi Kawano et al. | 2011
- 035008
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Heterogenous integration of a thin-film GaAs photodetector and a microfluidic device on a silicon substrateFuchuan Song / Jing Xiao / Fidaali Udawala / Sang-Woo Seo et al. | 2011
- 035009
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Dynamic actuation methods for capacitive MEMS shunt switchesM E Khater / K Vummidi / E M Abdel-Rahman / A H Nayfeh / S Raman et al. | 2011
- 035010
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Real-time measurement of the three-axis contact force distribution using a flexible capacitive polymer tactile sensorHyung-Kew Lee / Jaehoon Chung / Sun-Il Chang / Euisik Yoon et al. | 2011
- 035011
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A low-temperature parylene-to-silicon dioxide bonding technique for high-pressure microfluidicsA T Ciftlik / M A M Gijs et al. | 2011
- 035012
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Comb-drive GaN micro-mirror on a GaN-on-silicon platformYongjin Wang / Takashi Sasaki / Tong Wu / Fangren Hu / Kazuhiro Hane et al. | 2011
- 035013
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Comparative analysis of the planar capacitor and IDT piezoelectric thin-film micro-actuator modelsOliver J Myers / M Anjanappa / Carl B Freidhoff et al. | 2011
- 035014
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Quantifying the optical sensitivity of planar Bragg gratings in glass micro-cantilevers to physical deflectionC Holmes / L G Carpenter / H L Rogers / J C Gates / P G R Smith et al. | 2011
- 035015
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Bias-assisted KOH etching of macroporous silicon membranesK Mathwig / M Geilhufe / F Müller / U Gösele et al. | 2011
- 035016
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3D molding of hierarchical micro- and nanostructuresBahador Farshchian / Steven M Hurst / Jaejong Lee / Sunggook Park et al. | 2011
- 035017
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Frequency response analysis of an accelerometer based on thermal convectionA Garraud / P Combette / F Pichot / J Courteaud / B Charlot / A Giani et al. | 2011
- 035018
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Design and fabrication of an ac-electro-osmosis micropump with 3D high-aspect-ratio electrodes using only SU-8Hamza A Rouabah / Benjamin Y Park / Rabih B Zaouk / Hywel Morgan / Marc J Madou / Nicolas G Green et al. | 2011
- 035019
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X-band microwave phase detector manufactured using GaAs micromachining technologiesDi Hua / Xiao-ping Liao / Yong-chang Jiao et al. | 2011
- 035020
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Development of a novel custom micro-tool for effective cutting of a precision microgroove array on a microscope slideShun-Tong Chen / Yun-Cheng Lai et al. | 2011
- 035021
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An active control strategy for reduction of pressure instabilities during flow boiling in a microchannelRohit R Bhide / Shiv G Singh / A Sridharan / Amit Agrawal et al. | 2011
- 035022
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MEMS earthworm: a thermally actuated peristaltic linear micromotorCraig Arthur / Neil Ellerington / Ted Hubbard / Marek Kujath et al. | 2011
- 035023
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Novel fabrication of an Au nanocone array on polycarbonate for high performance surface-enhanced Raman scatteringWei-Yi Chang / Kai-Heng Lin / Jing-Tang Wu / Sen-Yeu Yang / Kuang-Li Lee / Pei-Kuen Wei et al. | 2011
- 035024
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Development of vacuum underfill technology for a 3D chip stackKatsuyuki Sakuma / Sayuri Kohara / Kuniaki Sueoka / Yasumitsu Orii / Mikio Kawakami / Kazuo Asai / Yoshikazu Hirayama / John U Knickerbocker et al. | 2011