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This paper reports on the potential of microelectrical discharge machining ((µEDM) as an innovative method for the fabrication of 3D microdevices. To demonstrate the wide capabilities of µEDM two different microsystemsa microfluidic device for the dispersion of nanoparticles and a star probe for microcoordinate metrologyare presented. To gain optimized process conditions as well as a high surface quality an adequate adaption of the single erosion parameters such as energy, pulse frequency and spark gap has to be carried out and is discussed below. Thus, a surface roughness of Ra = 80 nm is achieved at the channel bottom. The fabricated stylus elements for the star probe have sphere diameters of 40-200 µm. For further surface quality enhancement a subsequent electrochemical polishing step is investigated. In case of the dispersion micromodule a combined process chain of µEDM-milling and electropolishing has reached a surface improvement above 70%.