Accuracy Analysis of Quality Factor Measurement Based on Time Domain Method for MEMS Resonators (English)
- New search for: Wang, Ling-yun
- New search for: Du, Xiao-Hui
- New search for: Su, Yuan-Zhe
- New search for: He, Jie
- New search for: Li, Yi-Pan
- New search for: Wu, De-Zhi
- New search for: Sun, Dao-Heng
- New search for: Wang, Ling-yun
- New search for: Du, Xiao-Hui
- New search for: Su, Yuan-Zhe
- New search for: He, Jie
- New search for: Li, Yi-Pan
- New search for: Wu, De-Zhi
- New search for: Sun, Dao-Heng
In:
Micro-Nano Technology XV, CSMNT, Annual Conference of Chinese Society of Micro-Nano Technology, 15, International Conference of Chinese Society of Micro-Nano Technology, 4
;
1131-1137
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2014
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ISSN:
- Conference paper / Print
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Title:Accuracy Analysis of Quality Factor Measurement Based on Time Domain Method for MEMS Resonators
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Contributors:Wang, Ling-yun ( author ) / Du, Xiao-Hui ( author ) / Su, Yuan-Zhe ( author ) / He, Jie ( author ) / Li, Yi-Pan ( author ) / Wu, De-Zhi ( author ) / Sun, Dao-Heng ( author )
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Published in:Key Engineering Materials ; 609-610 ; 1131-1137
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Publisher:
- New search for: Trans Tech Publications
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Place of publication:Zürich
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Publication date:2014
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Size:7 Seiten
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ISSN:
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DOI:
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Type of media:Conference paper
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Type of material:Print
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Language:English
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Keywords:
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Source: