A design tool for pressure microsensors based on FEM simulations (English)
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- New search for: Bistue, G.
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- New search for: Garcia-Alonso, S.
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In:
Sensors and Actuators, A, Physical
;
62
, 1-3
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591-594
;
1997
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ISSN:
- Article (Journal) / Print
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Title:A design tool for pressure microsensors based on FEM simulations
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Contributors:Bistue, G. ( author ) / Elizalde, J.G. ( author ) / Garcia-Alonso, S. ( author ) / Castano, E. ( author ) / Gracia, F.J. ( author ) / Garcia-Alonso, A. ( author )
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Published in:Sensors and Actuators, A, Physical ; 62, 1-3 ; 591-594
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Publisher:
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Publication date:1997
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Size:4 Seiten, 9 Quellen
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ISSN:
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Coden:
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DOI:
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Type of media:Article (Journal)
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Type of material:Print
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Language:English
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Keywords:
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Source:
Table of contents – Volume 62, Issue 1-3
The tables of contents are generated automatically and are based on the data records of the individual contributions available in the index of the TIB portal. The display of the Tables of Contents may therefore be incomplete.
- 475
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Calibration procedure for piezoresistance coefficients of polysilicon sheets and application to a stress test chipBossche, A. et al. | 1997
- 480
-
Microchannels for applications in liquid dosing and flow-rate measurementRichter, M. et al. | 1997
- 484
-
Thermosensitive quartz resonators at cryogenic temperaturesSpassov, L. et al. | 1997
- 488
-
Featureless classification of tactile contacts in a gripper using neural networksJiménez, A.R. et al. | 1997
- 492
-
A spatio-temporal differentiation light sensorWang, C. et al. | 1997
- 496
-
Magnetic-field sensors based on amorphous alloys for high-sensitivity low-frequency measurementsSokol-Kutylovskij, O.L. et al. | 1997
- 501
-
Static stress optical-fiber sensorGafsi, R. et al. | 1997
- 506
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Asymmetrical locations of heaters and sensors relative to each other using heater arrays: A novel method for designing multi-range electrocaloric mass-flow sensorsNguyen, N.T. et al. | 1997
- 513
-
Colour sensors based on active interference filters using silicon-compatible materialsPoenar, D.P. et al. | 1997
- 524
-
Photosensor and optical waveguide coupling in silicon technologyMoreno, M. et al. | 1997
- 529
-
Advanced integrated magnetic-field sensors with frequency outputGumenjuk, S. et al. | 1997
- 534
-
Error analysis of phase-shift laser rangefinder with high-level signalPerchet, G. et al. | 1997
- 539
-
Optimum design considerations for silicon piezoresistive pressure sensorsKanda, Y. et al. | 1997
- 543
-
Transverse waves trapped by metallic gratings deposited on thin quartz platesBriot, J.B. et al. | 1997
- 551
-
A solid-state pressure-sensing microsystem for biomedical applicationsChatzandroulis, S. et al. | 1997
- 556
-
Using of tactile transducer for pressure-distribution measurement on the sole of the footVolf, J. et al. | 1997
- 562
-
Immunosensing with surface acoustic wave sensorsWelsch, W. et al. | 1997
- 565
-
Study of nonwoven mass reorganization under tensile stress thanks to a new optical sensor and image analysisThorr, F. et al. | 1997
- 571
-
Thermal microsensor with a.c. heating for gas-pressure measurementsGrudin, O.M. et al. | 1997
- 576
-
Mode coupling aspects in a vibrating gyroscopeAnsel, Y. et al. | 1997
- 582
-
Integrated multifunctional humidity sensorKrutovertsev, S.A. et al. | 1997
- 586
-
Improvement of the linearity of a capacitive pressure sensor using an interdigitated electrode structureKim, H. et al. | 1997
- 591
-
A design tool for pressure microsensors based on FEM simulationsBistué, G. et al. | 1997
- 595
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Narrow spectral optoelectronic sensors in remote-control equipmentVerkelis, J. et al. | 1997
- 599
-
Characterization of a planar microcoil for implantable microsystemsNeagu, C.R. et al. | 1997
- 612
-
Silicon thermal microrelays with multiple switching statesHiltmann, K. et al. | 1997
- 616
-
A low-frequency micromechanical resonant vibration sensor for wear monitoringFritsch, H. et al. | 1997
- 621
-
Sensors on low-dimensional silicon structuresBilenko, D. et al. | 1997
- 624
-
LPE growth and characterization of InGaAsP/InP heterostructures: IR light-emitting diodes at 1.66 m. Application to the remote monitoring of methane gasVolkov, V. V. / Van Landuyt, J. / Marushkin, K. / Gijbels, R. / Ferauge, C. / Vasilyev, M. G. / Shelyakin, A. A. / Sokolovsky, A. A. et al. | 1997
- 624
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LPE growth and characterization of InGaAsP-InP heterostructures: IR light-emitting diodes at 1.66 mm. Application to the remote monitoring of methane gasVolkov, V.V. et al. | 1997
- 624
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LPE growth and characterization of InGaAsP/InP heterostructures: IR light-emitting diodes at 1.66 mu m. Application to the remote monitoring of methane gasVolkov, V.V. / Van Landuyt, J. / Marushkin, K. / Gijbels, R. / Ferauge, C. / Vasilyev, M.G. / Shelyakin, A.A. / Sokolovsky, A.A. et al. | 1997
- 633
-
Electrically removable, micromachined encapsulation for sensitive materialsRoth, M. et al. | 1997
- 636
-
Bipolar-compatible epitaxial poly for smart sensors: Stress minimization and applicationsGennissen, P.T.J. et al. | 1997
- 646
-
A study of two-step silicon anisotropic etching for a polygon-shaped microstructure using KOH solutionKang, I.-B. et al. | 1997
- 652
-
New silicon micromachining techniques for microsystemsFrench, P.J. et al. | 1997
- 663
-
In situ stress measurements of sputter-deposited filmsHonda, N. et al. | 1997
- 668
-
Optimization of a three-electrode electrochemical etch-stop processElizalde, J.G. et al. | 1997
- 672
-
Chip elements for fast thermocyclingPoser, S. et al. | 1997
- 676
-
Improvement of the porous silicon sacrificial-layer etching for micromachining applicationsNavarro, M. et al. | 1997
- 680
-
Low-temperature intermediate Au-Si wafer bonding; eutectic or silicide bondWolffenbuttel, R.F. et al. | 1997
- 687
-
On temperature dependence of conductivity and thermopower of co-sputtered Nix-(SiO2)1-x composite thin filmsChiriac, H. et al. | 1997
- 692
-
Problems of sacrificial etching in the presence of aluminium interconnectGoosen, J.F.L. et al. | 1997
- 698
-
Mechanical sensors integrated in a commercial CMOS technologyBausells, J. et al. | 1997
- 705
-
Ion implantation for nucleation of electroless Ni films on <100> SiBhansali, S. et al. | 1997
- 711
-
Introduction to IEEE-PI 451, the emerging hardware-independent communication standard for smart transducersBryzek, J. et al. | 1997
- 711
-
Introduction to IEEE-P1451, the emerging hardware-independent communication standard for smart transducersBryzek, J. et al. | 1997
- 724
-
High-precision intelligent interface for a hybrid electronic noseDyer, D.C. et al. | 1997
- 729
-
Multisensor signal processing with CAN bus interfaceRietz, S. et al. | 1997
- 734
-
Analysis of complex impedances in CMOS technology for chemical sensor applicationsBeckmann, F. et al. | 1997
- 741
-
Microstereophotolithography and shape memory alloy for the fabrication of miniaturized actuatorsBallandras, S. et al. | 1997
- 748
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Simulation of self-control of an electrostatic micromotor for an intravascular echographic systemDufour, I. et al. | 1997
- 752
-
Piezoelectrically driven micropump for on-demand fuel-drop generation in an automobile heater with continuously adjustable power outputEderer, I. et al. | 1997
- 756
-
Simulation and fabrication of micromachined cantilever valvesKoch, M. et al. | 1997
- 760
-
Experimental adaptation of model parameters for microelectromechanical systems (MEMS)Kurth, S. et al. | 1997
- 765
-
Micromechanical ultrasonic liquid nebulizerPaneva, R. et al. | 1997
- 769
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Author Index of Volumes A60, A61 and A62| 1997
- 773
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Subject Index of Volumes A60, A61 and A62| 1997