Year of publication
Type of material
Licence
Synonyms were used for: Reactive sputtering
Search without synonyms: keywords:("Reactive sputtering")
Used synonyms:
- reactive sputtering process
- reactive sputtering prozess
- reaktive kathodenzerstaubung
- reaktive katodenzerstaubung
- reaktives sputtern
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Determination of dielectric constant and loss of high-K thin films in the microwave frequencies
Tema Archive | 2010|Keywords: reaktive Kathodenzerstäubung -
Structure and photoluminescence properties of SiCN films grown by dual ion beam reactive sputtering deposition
Elsevier | 2013|Keywords: Reactive sputtering deposition -
Effect of heat treatment on magnetic and electrical properties of AIN films with Co particles
Tema Archive | 2012|Keywords: reaktive Kathodenzerstäubung -
Characterisation of Cu2O, Cu4O3, and CuO mixed phase thin films produced by microwave-activated reactive sputtering
Elsevier | 2017|Keywords: Microwave-activated reactive sputtering -
Modeling target erosion during reactive sputtering
Tema Archive | 2015|Keywords: reaktive Kathodenzerstäubung -
Structural and mechanical evolution of reactively and non-reactively sputtered Zr–Al–N thin films during annealing
Elsevier | 2014|Keywords: Non-reactive sputtering -
Tribochemically Active Ti–C–S Nanocomposite Coatings
Free accessTaylor & Francis Verlag | 2013|Keywords: Reactive Sputtering -
Oscillations and power-dependent hysteresis in reactive ZnO plasma
Elsevier | 2009|Keywords: Reactive sputtering -
Annealing behavior of reactively sputtered precursor films for Cu2ZnSnS4 solar cells
Tema Archive | 2013|Keywords: reaktive Kathodenzerstäubung -
Microstructure and piezoelectric response of YxAl1− xN thin films
Elsevier | 2015|Keywords: Reactive sputtering -
Controlled oxygen incorporation into DC sputtered vanadium coatings for high-efficiency infrared shielding
Elsevier | 2022|Keywords: Reactive sputtering -
Gas aggregation nanocluster source — Reactive sputter deposition of copper and titanium nanoclusters
Elsevier | 2010|Keywords: Reactive sputtering -
Effect of ZnO buffer layer thickness on the epitaxial growth of GaN by reactive magnetron sputtering
Elsevier | 2013|Keywords: Reactive sputtering -
Effect of substrate-target distance and sputtering pressure in the synthesis of AlN thin films
Tema Archive | 2011|Keywords: reaktive Kathodenzerstäubung -
Opto-electrical properties and internal stress in Al:ZnO thin films deposited by direct current reactive sputtering
Elsevier | 2019|Keywords: Reactive sputtering -
Room temperature photoluminescence and spectroscopic ellipsometry of reactive co-sputtered Cu-doped ZnO thin films
Elsevier | 2022|Keywords: Reactive sputtering -
An investigation into the high performance of TiN-coated rollers in burnishing process
Elsevier | 2008|Keywords: Reactive sputtering -
Uniform Non-stoichiometric Titanium Nitride Thin Films for Improved Kinetic Inductance Detector Arrays
Online Contents | 2016|Keywords: Reactive sputtering
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