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A new multiple wavelength ellipsometric imager: design, limitations and applications
Online Contents | 2004| -
Automated metrology system including VUV spectroscopic ellipsometry and X-ray reflectometry for 300 mm silicon microelectronics
Online Contents | 2004|Contributors: Evrard, P. -
A new multiple wavelength ellipsometric imager: design, limitations and applications
Online Contents | 2004| -
Automated metrology system including VUV spectroscopic ellipsometry and X-ray reflectometry for 300 mm silicon microelectronics
Online Contents | 2004|Contributors: Evrard, P. -
Automated metrology system including VUV spectroscopic ellipsometry and X-ray reflectometry for 300 mm silicon microelectronics
Online Contents | 2004|Contributors: Evrard, P. -
A transmission electron microscopy study of low‐temperature reaction at the Co‐Si interface
National licenceAmerican Institute of Physics | 1990| -
Multicouches nanométriques pour l'optique X : quelques exemples applicables aux lasers X
EDP Sciences | 1992| -
Design and manufacture of sputtered multilayers for applications to soft X-ray optics
EDP Sciences | 1994| -
Design and manufacture of sputtered multilayers for applications to soft X-ray optics
British Library Online Contents | 1994|
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