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Growth process of silicon over SiO2 by CVD: Epitaxial lateral overgrowth technique
Tema Archive | 1983|Keywords: EPITAXIAL LATERAL OVERGROWTH, ELO (EPITAXIAL LATERAL OVERGROWTH) -
SOI by CVD epitaxial lateral overgrowth (ELO) process-review
Tema Archive | 1983|Keywords: ELO (EPITAXIAL LATERAL OVERGROWTH) -
The characterization of CVD single-crystal silicon on insulators: Heteroepitaxy and epitaxial lateral overgrowth
Tema Archive | 1983|Keywords: ELO (EPITAXIAL LATERAL OVERGROWTH) -
Selective epitaxial growth for the fabrication of CMOS integrated circuits
Tema Archive | 1984|Keywords: ELO (EPITAXIAL LATERAL OVERGROWTH) -
Silicon CVD for SOI: Principles and possible applications
Tema Archive | 1984|Keywords: ELO (EPITAXIAL LATERAL OVERGROWTH) -
Preparation of thin (0.6 mum) continuous monocrystalline silicon over SiO2
Tema Archive | 1985|Keywords: EPITAXIAL LATERAL OVERGROWTH -
Epitaxial lateral overgrowth of silicon over steps of thick SiO2
Tema Archive | 1986|Keywords: SI EPITAXIAL LATERAL OVERGROWTH -
GaAs Thin Film Solar Cells Obtained by Vapour Phase Homoepitaxy (VPE) on Reusable Substrates
Springer Verlag | 1987|Keywords: Epitaxial Lateral Overgrowth -
A new epitaxial lateral overgrowth silicon bipolar transistor
Tema Archive | 1987|Keywords: ELO (EPITAXIAL LATERAL OVERGROWTH) -
A new soft-error immune DRAM cell with a transistor on a lateral epitaxial silicon layer (TOLE cell)
Tema Archive | 1987|Keywords: EPITAXIAL LATERAL OVERGROWTH -
Fabrication results of a silicon epitaxial lateral overgrowth bipolar transistor without a buried collector
Tema Archive | 1987|Keywords: EPITAXIAL LATERAL OVERGROWTH BIPOLAR JUNCTION TRANSISTOR -
Selective epitaxial growth silicon bipolar transistors for material characterization
Tema Archive | 1988|Keywords: EPITAXIAL LATERAL OVERGROWTH, ELO (EPITAXIAL LATERAL OVERGROWTH) -
Epitaxial lateral overgrowth (ELO) of silicon on the whole surface
Tema Archive | 1988|Keywords: EPITAXIAL LATERAL OVERGROWTH -
Fabrication of SOI CMOS over large-area continuous-oxide films formed using epitaxial lateral overgrowth techniques
Tema Archive | 1988|Keywords: EPITAXIAL LATERAL OVERGROWTH, ELO (EPITAXIAL LATERAL OVERGROWTH) -
A novel quasi-dielectrically isolated bipolar transistor using epitaxial lateral overgrowth
Tema Archive | 1988|Keywords: EPITAXIAL LATERAL OVERGROWTH -
SEG/ELO material characterization using silicon bipolar transistors
Tema Archive | 1988|Keywords: EPITAXIAL LATERAL OVERGROWTH -
Thinning techniques for 1 mu m ELO-SOI
Tema Archive | 1988|Keywords: GROWING EPITAXIAL LATERAL OVERGROWTH -
MONO/POLY technology for fabricating low-capacitance CMOS integrated circuits
Tema Archive | 1988|Keywords: EPITAXIAL LATERAL OVERGROWTH TECHNIQUE -
Low Temperature Silicon Epitaxy for Novel Device Structures
Springer Verlag | 1989|Keywords: Epitaxial Lateral Overgrowth -
Issues and problems involved in selective epitaxial growth of silicon for SOI fabrication
Tema Archive | 1989|Keywords: EPITAXIAL LATERAL OVERGROWTH
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