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Lithography and OPC friendly triple patterning decomposition method for VIA [10147-55]
British Library Conference Proceedings | 2017 -
450mm lithography status for high volume manufacturing [10147-11]
British Library Conference Proceedings | 2017 -
Application of optical similarity in OPC model calibration [10147-62]
British Library Conference Proceedings | 2017 -
Layout independent leveling (LIL) on NXT:1980Di immersion scanners for enhanced productivity [10147-45]
British Library Conference Proceedings | 2017 -
Reducing the impact of etch-induced pattern shift on overlay by using lithography and etch tool corrections [10147-16]
British Library Conference Proceedings | 2017 -
Compact modeling for the negative tone development processes [10147-63]
British Library Conference Proceedings | 2017 -
Experimental characterization of NTD resist shrinkage [10147-14]
British Library Conference Proceedings | 2017 -
The ArF laser for the next generation multiple-patterning immersion lithography supporting green operations and leading edge processes [10147-44]
British Library Conference Proceedings | 2017 -
Neuroelectronic device process development and challenge [10147-31]
British Library Conference Proceedings | 2017 -
Excimer laser gas usage reduction technology for semiconductor manufacturing [10147-60]
British Library Conference Proceedings | 2017 -
Adjusting the transmission bands of the negative curvature hollow-core fibers
British Library Conference Proceedings | 2023| -
Design and fabrication of special photonic crystal fibers for sensing applications
British Library Conference Proceedings | 2023| -
Numerical optimization of tunable Dy-doped ZBLAN fiber lasers for yellow emission
British Library Conference Proceedings | 2023| -
Direct measurement of the maximum detection range of an automotive lidar with a table-top setup for series production
British Library Conference Proceedings | 2023| -
Tailored gas-absorbing materials for packaged opto-electronic devices
British Library Conference Proceedings | 2023| -
Fiber optical coupling with engineered scattering elements
British Library Conference Proceedings | 2023| -
Interlayer verification methodology for multi-patterning processes [10147-18]
British Library Conference Proceedings | 2017 -
Performance analyses of plasmonic lithography [10147-29]
British Library Conference Proceedings | 2017
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