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Inductive plasmas in Cl2/Ar : Comparison of hybrid model results with experimental measurements
British Library Conference Proceedings | 2010| -
Sheath electric field oscillation and ion kinetics in radio-frequency discharges
Tema Archive | 1996| -
Gas Temperature Measurement in Ar and Ar-Cl~2 Based ICP Discharge: Comparison Between Experiments and Simulations
British Library Conference Proceedings | 2012| -
Surface loss rates of H and Cl radicals in an inductively coupled plasma etcher derived from time-resolved electron density and optical emission measurements
British Library Online Contents | 2010| -
P1-21 Plasma Sensing Diagnostic Probe for Advanced Process Control
British Library Conference Proceedings | 2008| -
Instabilities in low pressure CF4 inductive discharges (PO.2.21)
British Library Conference Proceedings | 2001| -
Hydrogenated microcrystalline silicon thin films deposited by RF-PECVD under low ion bombardment energy using voltage waveform tailoring
Online Contents | 2012|Contributors: Booth, J.P. -
CLASSICAL PHENOMENOLOGY: Electricity, Magnetism, Optics, Acoustics, Heat, Mechanics (PACS 41-52) - High mass positive ions and molecules in capacitively-coupled radio-frequency CF4 plasmas
Online Contents | 1999|Contributors: Booth, J.P. -
A novel electrostatic probe method for ion flux measurements
Online Contents | 1996|Contributors: Booth, J.P. -
Absolute concentration measurements by pulsed laser-induced fluorescence in low-pressure gases: Allowing for saturation effects
Online Contents | 1996|Contributors: Booth, J.P.
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