Year of publication
Type of media
Source
Type of material
Licence
Language
1–20 of 27 hits
Sort by:
Sort by:
-
Effect of iodotrifluoromethane plasma for reducing ultraviolet light irradiation damage in dielectric film etching processes
American Institute of Physics | 2010| -
Generation and reduction in SiO2/Si interface state density during plasma etching processes
National licenceAmerican Institute of Physics | 2008| -
UV photon-induced defect and its control in plasma etching processes
National licenceAmerican Institute of Physics | 2008| -
Ultraviolet-induced damage in fluorocarbon plasma and its reduction by pulse-time-modulated plasma in charge coupled device image sensor wafer processes
American Institute of Physics | 2004| -
Environmentally harmonized CF3I plasma for low-damage and highly selective low-k etching
National licenceAmerican Institute of Physics | 2008| -
Low-damage low- etching with an environmentally friendly plasma
American Institute of Physics | 2008| -
On-wafer monitoring of charge accumulation and sidewall conductivity in high-aspect-ratio contact holes during etching process
American Institute of Physics | 2007| -
UV photon-induced defect and its control in plasma etching processes
Online Contents | 2008|Contributors: Ichihashi, Yoshinari
Send my search to (beta)
Send your search query (search terms without filters) to other databases, portals and catalogues to find more interesting hits.
Dimensions:
full data search
or
title and abstract search
Dimensions is a database for abstracts and citations that links information on research funding with the resulting publications, studies and patents.
TIB AV portal
In the TIB AV-Portal, audiovisual media from science and teaching can be foundand own scientific videos can be published.
Specialised Information Service for Mobility and Transport Research (FID move)
Open Research Knowledge Graph (ORKG)
The FID move can be used to search for subject-specific literature, research data and other information from mobility and transport research.
The Open Research Knowledge Graph provides structured descriptions of research content and makes it comparable.
Common Union Catalogue (GVK)
Freely accessible part of the collaborative K10plus catalogue with materials relevant for interlibrary loan and direct delivery services.