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Impact of Curing Condition on Chemical Stability of Ultralow-k PMO Material
British Library Conference Proceedings | 2012| -
High Sputter Bias Super Secondary Grain Growth Initiation (In Structures)
British Library Conference Proceedings | 2007| -
Formation, processing and characterization of Co–Sn intermetallic compounds for potential integration in 3D interconnects
British Library Online Contents | 2015| -
Fabrication of Porogen Residue Free Ultra Low-k PECVD Material by Subsequent H~2-Afterglow Plasma Treatment and UV Curing
British Library Conference Proceedings | 2010| -
Extraction of elastic modulus of porous ultra-thin low-k films by two-dimensional finite-element simulations of nanoindentation
American Institute of Physics | 2016| -
Extraction of elastic modulus of porous ultra-thin low-k films by two-dimensional finite-element simulations of nanoindentation
Online Contents | 2016|Contributors: Vanstreels, K -
Evaluation of a New Advanced Low-k Material (5 pages)
British Library Conference Proceedings | 2011| -
Evaluation of an Advanced Organic Ultra-Low-k Material
British Library Conference Proceedings | 2008| -
Electrical performance, reliability and microstructure of sub-45nm copper damascene lines fabricated with TEOS backfill
British Library Online Contents | 2007| -
Electrical performance, reliability and microstructure of sub-45nm copper damascene lines fabricated with TEOS backfill
British Library Conference Proceedings | 2007| -
Effect of UV wavelength on the hardening process of porogen-containing and porogen-free ultralow-k plasma-enhanced chemical vapor deposition dielectrics
British Library Online Contents | 2011| -
Effect of Porogen Residue on Chemical, Optical, and Mechanical Properties of CVD SiCOH Low-k Materials
British Library Online Contents | 2009| -
Effect of Pore Structure of Nanometer Scale Porous Films on the Measured Elastic Modulus
British Library Online Contents | 2013| -
Effect of bake/cure temperature of an advanced organic ultra low-k material on the interface adhesion strength to metal barriers (8 pages)
British Library Online Contents | 2011| -
Effect of 4-point bending test procedure on crack propagation in thin film stacks
British Library Online Contents | 2015|
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