Year of publication
Type of media
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TIB reading rooms collection
Synonyms were used for: Microlithography
Search without synonyms: keywords:("Microlithography")
Used synonyms:
- mikrolithografie
- mikrolithographie
-
Photomask and X-ray mask technology III : 18-19 April 1996, Kawasaki City, Kanagawa, Japan ; [invited and contributed papers presented at Photomask Japan '96]
TIBKAT | 1996|Keywords: Microlithography -
Photomask and next-generation lithography mask technology XVII : 13 - 15 April 2010, Yokohama, Japan
TIBKAT | 2010|Keywords: Microlithography -
Photomask and next-generation lithography mask technology XVI : 8 - 10 April 2009, Yokohama, Japan
TIBKAT | 2009|Keywords: Microlithography -
Technologies for microlithography manufacturing : [meeting], 11 July 1995, San Francisco, California ; [presented at SEMICON/WEST'95]
TIBKAT | 1995|Keywords: Microlithography -
Photomask and next-generation lithography mask technology XV : 16 - 18 April 2008, Yokohama, Japan / sponsored by PMJ, Photomask Japan ... Toshiyuki Horiuchi, ed. ; Pt. 2
TIBKAT | 2008|Keywords: Microlithography -
Handbook of microlithography, micromachining, and microfabrication / P. Rai-Choudhury, ed ; Vol. 2: Micromachining and microfabrication
TIBKAT | 1997|Keywords: Microlithography -
Polymers for high technology : electronics and photonics ; developed from a symposium sponsored by the Division of Polymeric Materials: Science and Engineering at the 192nd Meeting of the American Chemical Society, Anaheim, California, September, 7 - 12, 1986
TIBKAT | 1987|Keywords: Microlithography -
Photomask and next-generation lithography mask technology XV : 16 - 18 April 2008, Yokohama, Japan / sponsored by PMJ, Photomask Japan ... Toshiyuki Horiuchi, ed. ; Pt. 1
TIBKAT | 2008|Keywords: Microlithography -
Handbook of VLSI microlithography : principles, technology, and applications
TIBKAT | 2001|Keywords: Microlithography -
Nanolithography and patterning techniques in microelectronics
TIBKAT | 2005|Keywords: Microlithography -
Photomask and next-generation lithography mask technology XIV : 17 - 19 April 2007, Yokohama, Japan / sponsored by PMJ, Photomask Japan ... Hidehiro Watanabe, ed. ; Pt. 2
TIBKAT | 2007|Keywords: Microlithography -
Advanced microlithography technologies : 8 - 10 November 2004, Beijing, China
TIBKAT | 2005|Keywords: Microlithography -
Photomask and next-generation lithography mask technology XIV : 17 - 19 April 2007, Yokohama, Japan / sponsored by PMJ, Photomask Japan ... Hidehiro Watanabe, ed. ; Pt. 1
TIBKAT | 2007|Keywords: Microlithography -
Handbook of VLSI microlithography : principles, technology, and applications
TIBKAT | 1991|Keywords: Microlithography -
Laser microfabrication : thin film processes and lithography
TIBKAT | 1989|Keywords: Microlithography -
Selected papers on resolution enhancement techniques in optical lithography
TIBKAT | 2004|Keywords: Microlithography -
Materials issues and modeling for device nanofabrication : symposia held November 29 - December 2, 1999 ; [contains most of the papers that were presented during Symposium J, "Advanced Materials and Techniques for Nanolithography", and Symposium N, "Atomic Scale Measurements and Atomistic Models of Epitaxial Growth and Lithography", held at the 1999 MRS Fall Meeting]
TIBKAT | 2000|Keywords: Microlithography -
Photomask and next-generation lithography mask technology X : [invited and contributed papers presented at Photomask Japan 2003] ; 16 - 18 April 2003, Yokohama, Japan
TIBKAT | 2003|Keywords: Microlithography
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