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Static and dynamic characterization of pull-in protected CMOS compatible poly-SiGe grating light valves
Elsevier | 2012|Keywords: Poly-SiGe -
Effects of Ti/Co and Co/Ti systems on the germanosilicidation of poly-Si capped poly-Si1−xGex substrate
Elsevier | 2004|Keywords: Poly-SiGe -
Realization of a wearable miniaturized thermoelectric generator for human body applications
Elsevier | 2009|Keywords: Poly-SiGe -
CMOS compatible polycrystalline silicon–germanium based pressure sensors
Elsevier | 2011|Keywords: Poly-SiGe -
Poly‐SiGe Surface Micromachining
Wiley | 2021|Keywords: poly‐SiGe surface micromachining, poly‐SiGe deposition -
Effect of silicidation on the electrical characteristics of polycrystalline-SiGe Schottky diode
Elsevier | 2005|Keywords: Poly-SiGe -
Au-induced lateral crystallization of a-Si1−xGex (x: 0–1) at low temperature
Elsevier | 2005|Keywords: Poly-SiGe -
With PECVD Deposited Poly-SiGe and Poly-Ge Forming Contacts Between MEMS and Electronics
Online Contents | 2019|Keywords: poly-SiGe -
An uncooled microbolometer infrared detector based on poly-SiGe thermistor
Elsevier | 2003|Keywords: Poly-SiGe -
Phase segregation in laser crystallized polycrystalline SiGe thin films
Elsevier | 2005|Keywords: Poly-SiGe thin films -
Monolithic Uncooled 8 × 8 Bolometer Arrays Based on Poly-SiGe Thermistor
Online Contents | 2006|Keywords: Poly-SiGe -
Electrical transport and optical properties of Al doped polycrystalline SiGe alloy thin film
Elsevier | 2020|Keywords: Poly-SiGe thin film -
Characterization and strain gradient optimization of PECVD poly-SiGe layers for MEMS applications
Elsevier | 2005|Keywords: Poly-SiGe -
Solid-phase crystallization of high-quality Si films on SiO2 by local Ge-insertion
Elsevier | 2003|Keywords: Poly-SiGe -
Analysis of excimer laser annealing of amorphous SiGe on La2O3//Si structures
Elsevier | 2007|Keywords: Poly SiGe -
Metal-induced crystallization of amorphous Si1−xGex by rapid thermal annealing
Elsevier | 2004|Keywords: Poly-SiGe -
Aluminum induced formation of SiGe alloy in Ge/Si/Al thin film structure
Elsevier | 2011|Keywords: Poly-SiGe -
Evaluation of Ultratrace Metallic Elements in Poly-SiGe Thin Films
National licenceTrans Tech Publications | 2003|Keywords: Poly-SiGe Film -
Low electrical resistivity polycrystalline SiGe films obtained by vertical LPCVD for MOS devices
Elsevier | 2005|Keywords: Poly-SiGe
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