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Inhibition of Crystal Growth during Plasma Enhanced Atomic Layer Deposition by Applying BIAS
Free accessFraunhofer Publica | 2015| -
Continuous profile writing by electron and optical lithography
British Library Online Contents | 1997| -
Efficient extreme ultraviolet transmission gratings for plasma diagnostics
British Library Online Contents | 2011| -
Photonic submicron-structures. Effective media for high-performance applications
Free accessFraunhofer Publica | 2010| -
Fast and high quality surface profiling for microoptical applications
British Library Conference Proceedings | 1994| -
Designing multiplane computer-generated holograms with consideration of the pixel shape and the illumination wave
British Library Online Contents | 2008| -
On the influence of the e-beam writer address grid on the optical quality of high-frequency gratings
British Library Conference Proceedings | 2001| -
On the influence of the e-beam writer address grid on the optical quality of high-frequency gratings
British Library Online Contents | 2001| -
Coupled grating reflectors with highly angular tolerant reflectance
British Library Online Contents | 2013|
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