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DESIGN AND FABRICATION OF MICRO-MIRRORS WITH REDUCED MOMENT OF INERTIA AND MEMS DEVICES
Free accessEuropean Patent Office | 2024| -
Design and fabrication of microelectromechanical systems devices and micromirrors with reduced moment of inertia
Free accessEuropean Patent Office | 2024| -
VERTICAL MECHANICAL STOPS TO PREVENT LARGE OUT-OF-PLANE DISPLACEMENTS OF A MICRO-MIRROR AND METHODS OF MANUFACTURE
Free accessEuropean Patent Office | 2023| -
MEMS MIRROR ARRAYS WITH REDUCED CROSSTALK AND METHODS OF MANUFACTURE
Free accessEuropean Patent Office | 2023| -
MEMS MIRROR ARRAY WITH REDUCED CROSS TALK AND METHOD OF MANUFACTURING
Free accessEuropean Patent Office | 2023| -
FABRICATION OF A MICRO-MIRROR WITH REDUCED MOMENT OF INERTIA AND MEMS DEVICES
Free accessEuropean Patent Office | 2023| -
MEMS MIRROR ARRAYS WITH REDUCED CROSSTALK AND METHODS OF MANUFACTURE
Free accessEuropean Patent Office | 2022| -
MEMS MIRROR ARRAYS WITH REDUCED COUPLING BETWEEN MIRRORS
Free accessEuropean Patent Office | 2024|
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