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Automated detection and classification of printing sub-resolution assist features using machine learning algorithms [10147-23]
British Library Conference Proceedings | 2017 -
Development of the next-generation ArF excimer laser with ultra-narrow stable spectral bandwidth for multiple patterning immersion lithography [10147-59]
British Library Conference Proceedings | 2017 -
Optical phased array based on subwavelength grating antennas
British Library Conference Proceedings | 2022| -
Transceiver circuits for high-baudrate optical interconnects
British Library Conference Proceedings | 2022| -
Lithography and OPC friendly triple patterning decomposition method for VIA [10147-55]
British Library Conference Proceedings | 2017 -
450mm lithography status for high volume manufacturing [10147-11]
British Library Conference Proceedings | 2017 -
Elimination of temperature cross-sensitivity for polymer FBG-based humidity sensor by gamma radiation treatment
British Library Conference Proceedings | 2023| -
Dynamic laser speckle imaging for estimation of microbial colony growth in a noisy environment
British Library Conference Proceedings | 2023| -
Brillouin interaction between single optical modes excited in multimode fibers
British Library Conference Proceedings | 2023| -
Bending fiber sensor based on capillary hollow-core fiber
British Library Conference Proceedings | 2023| -
High performance photonics-based biosensing platform for COVID detection
British Library Conference Proceedings | 2023| -
In-process optical monitoring of contamination in an additively manufactured titanium alloy
British Library Conference Proceedings | 2023| -
Ultra-high sensitive 2D photonic crystal for gas and chemical sensing applications
British Library Conference Proceedings | 2023| -
Nucleolin protein-mediated specific detection of circulating cancer cells by U-bent optical fiber sensor
British Library Conference Proceedings | 2023| -
Design fiber-to-waveguide coupling for photonic integrated circuits
British Library Conference Proceedings | 2023| -
The pattern-matching based OPC approach for preemptively fixing the weak points [10147-53]
British Library Conference Proceedings | 2017 -
Interlayer verification methodology for multi-patterning processes [10147-18]
British Library Conference Proceedings | 2017
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