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Lithography tool improvement at productivity and performance with data analysis and machine learning
British Library Conference Proceedings | 2021| -
Effective data sampling techniques for machine learning OPC in full chip production
British Library Conference Proceedings | 2021| -
Thermostatic system of sensor in NIR spectrometer based on PID control [10141-19]
British Library Conference Proceedings | 2016 -
Silicon nitride thin film for optofluidic sensor application
British Library Conference Proceedings | 2023| -
Advanced ILT solutions to manufacture photonics designs
British Library Conference Proceedings | 2021| -
Research on flight stability performance of rotor aircraft based on visual servo control method [10141-67]
British Library Conference Proceedings | 2016 -
Lithocell availability improvement through light source maintenance cycle improvement and optimization and its availability impact analysis for cutting-edge ArFi light source
British Library Conference Proceedings | 2021| -
Experimental verification of on-product overlay improvement by intra-lot overlay control using metrology based grouping [10147-38]
British Library Conference Proceedings | 2017 -
Fast prediction of process variation band through machine learning models
British Library Conference Proceedings | 2021| -
Automatic parameter setting for lens aberration control during product lot exposure
British Library Conference Proceedings | 2019| -
Metrology and deep learning integrated solution to drive OPC model accuracy improvement
British Library Conference Proceedings | 2019| -
Metal coated fiber sensor for laser power measurements with enhanced sensitivity
British Library Conference Proceedings | 2019| -
An OPC approach to improve logic gate features corner fidelity
British Library Conference Proceedings | 2019| -
Modeling of dynamic image performance for lithographic projection lens
British Library Conference Proceedings | 2019| -
Motion of optically bound particles in tractor beam [10712-27]
British Library Conference Proceedings | 2018 -
Slope-sensitive optical probe for freeform optics metrology [8884-85]
British Library Conference Proceedings | 2013|
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