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TIB reading rooms collection
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Laser microfabrication : thin film processes and lithography
TIBKAT | 1989|Keywords: Microlithography -
Selected papers on resolution enhancement techniques in optical lithography
TIBKAT | 2004|Keywords: Microlithography -
Materials issues and modeling for device nanofabrication : symposia held November 29 - December 2, 1999 ; [contains most of the papers that were presented during Symposium J, "Advanced Materials and Techniques for Nanolithography", and Symposium N, "Atomic Scale Measurements and Atomistic Models of Epitaxial Growth and Lithography", held at the 1999 MRS Fall Meeting]
TIBKAT | 2000|Keywords: Microlithography -
Photomask and next-generation lithography mask technology X : [invited and contributed papers presented at Photomask Japan 2003] ; 16 - 18 April 2003, Yokohama, Japan
TIBKAT | 2003|Keywords: Microlithography
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